Micro-Optics

High-Quality Micro-Optics

SUSS MicroOptics is a leading company for high-quality refractive and diffractive micro-optics.

We comprise profound experience in optical design, micro-fabrication and metrology and are committed to providing the highest quality components through leading edge manufacturing techniques, based on 200mm wafer technology in Quartz and Silicon. Combined with a unique blend of people skills, our innovative advances in technology make us a leader in our product offerings.

  • Refractive Microlenses
  • Diffractive Optics
  • Nipkow Discs & Pinhole Discs
  • Additional Options
  • Fiber Coupling
  • Beam Homogenizers and Beam Shapers
  • Photolithography
  • Laser Beam Shaping
  • Shack Hartmann Arrays
  • Slow Axis Collimation
Downloads
MO Exposure Optics Datasheet 368kb
Related Publications

Printing sub-micron structures using Talbot mask-aligner lithography with a 193 nm CW laser light source

Aug. 20, 2018

Printing sub-micron structures using Talbot mask-aligner lithography with a 193 nm CW laser light source

Evaluation of a Novel Exposure Concept to Enhance the Capabilities of Mask Aligner Lithography at Large Proximity Gaps

Evaluation of a Novel Exposure Concept to Enhance the Capabilities of Mask Aligner Lithography at Large Proximity Gaps

3D Topography Mask Aligner Lithography Simulation

3D Topography Mask Aligner Lithography Simulation

LED Wafer Level Packaging – Motivation, Challenges and Solutions to Meet Future Cost Targets

LED Wafer Level Packaging – Motivation, Challenges and Solutions to Meet Future Cost Targets

Simulation for Advanced Mask Aligner Lithography

Simulation for Advanced Mask Aligner Lithography

Advanced Mask Aligner Lithography (AMALITH)

Advanced Mask Aligner Lithography (AMALITH)

Technical Publications
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