SUSS Imprint Excellence Center


Imprint Lithography is a key technology for many emerging applications such as LED, MEMS/NEMS, microoptics, augmented reality and optoelectronics sensors. SUSS MicroTec and SUSS MicroOptics share decades of imprint technology expertise and manufacturing experience. At the SUSS Imprint Excellence Center, customers benefit from this expertise. They have access to a broad range of SUSS Imprint Technologies and can draw on deep process applications experience, also following automotive standards.

At the SUSS Imprint Excellence Center, we provide

  • A fully equipped imprint facility
  • Access to a proven supply chain
  • Access to metrology equipment
  • Back-end equipment and processes by our partners
  • SUSS equipment for developing and testing imprint technology processes
  • Access to optics knowledge and experience

From designing and prototyping to ramp-up services and transfer to high-volume production, SUSS MicroTec offers comprehensive imprint solutions including micro imprint, nano imprint and wafer-level optics assembly.
Customized arrangements according to the specific needs of customers are available: Whether it is the complete development process from the idea to mass production or concrete individual steps, the SUSS Imprint Excellence Center provides the perfect environment for your Imprint Lithography needs.


Imprint Facility

The SUSS Imprint Excellence Center supports a fully equipped facility with a state-of-the-art ISO6 cleanroom and a secure work and office area for customer use. It is ISO 9001 and IATF 16949 certified.

SUSS Equipment

The SUSS Imprint Excellence Center provides the SUSS equipment for imprint lithography processes, including mask and bond aligners, solutions for nano- and micro-imprint lithography and WLO assembly. In addition, we support our customers with demonstrations of their processes, and they benefit from the experience of the SUSS application experts. Special training on our equipment for operators with all levels of experience is also available.

Metrology equipment

Confocal microscopy, white light interferometry, reflectometry, Scanning Electron Microscopy, profilometers

Back-end Processes and Equipment

At the SUSS Imprint Excellence Center, customers have access to processes and equipment that enable them to create applications of the highest complexity and accuracy. This includes facilities, dicing, sorting, packaging, wafer-level-packaging and a fully equipped metrology lab for inspection and sorting of microoptical components (ISO 9001 and IATF 16949 certified). Furthermore, a SUSS MicroOptics production line for micro lens imprint is available.


Supply Chain Access

SUSS MicroTec works closely with partners who have broad experience in accompanying processes including resist suppliers, polymer suppliers and master manufacturers. Our customers have access to this proven supply chain and thus benefit greatly from our partnerships.

Optics Knowledge and Expertise

SUSS MicroTec and SUSS MicroOptics have more than 20 years of experience in imprint lithography. At the SUSS Imprint Excellence Center, we offer access to this optics know-how. We support our customer’s prototyping and simulation, provide guidance with optical and system design as well as mastering and foundry services. This also includes optional transfer to high-volume production and system engineering.


Visit the SUSS MicroOptics website


SUSS Services for Imprint Lithography


Design & Prototyping Ramp-Up Service Transfer to Production
  • Feasibility Study
  • Optical Engineering
  • Optical System Design
  • Mask Layout
  • Master Manufacturing
  • Process Development
  • Metrology, Analysis
  • Customer Demos on SUSS Equipment
  • Prototyping & Sampling
  • Stamp Manufacturing
  • Pre-Series (up to 2'000 Wafers per month)
  • Process Optimization
  • Customized SUSS Equipment
  • Support for Industrialization, Implementation and Ramp-Up
  • Support for the Layout of Production Line
  • Installation of SUSS Equipment
  • Process Transfer and Implementation
  • Operator Training
  • Troubleshooting
  • Development of Next-Generation at SMO




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