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Timeless Quality – Trusted Engineering

ReMan – Certified Remanufactured line of SUSS MicroTec quality products

SUSS Remanufactured and Certified Tools are completely reconditioned by our technical experts. Genuine spare parts and state-of-the art testing methods assure 100% conformity to original specifications. Our remanufactured tools are fully upgraded to meet the latest technical standards and safety requirements and come with installation, process qualification and a full 6 month warranty.

  • Higher value OEM remanufactured tools
  • Configured to meet customer specifications and safety-standards
  • Installation and warranty by SUSS Microtec ReMan
  • Guaranteed SUSS MicroTec quality
Contact

Contact

SUSS MicroTec ReMan GmbH
Mittenheimerstr. 60
85764 Oberschleissheim
Germany

Fon +49 89 32007-550
Fax +49 89 32007-555
Email info@suss.com

Mask Aligner

The SUSS MicroTec Mask Aligner has become synonymous with superior quality, high alignment accuracy, and sophisticated exposure optics. SUSS MicroTec offers a complete range of mask aligners for high-end fab automation, high volume production and R&D environments alike.

Coater & Developer

SUSS MicroTec spin coaters and spray coaters have become synonymous with premium performance, ease of use, flexibility and enhanced coating mastery. With a complete line of compact and user-friendly resist coating equipment from economic low-volume laboratory tools to high-end production systems up to 300 mm SUSS MicroTec spin coaters and spray coaters enable the formation of resist layers ranging from below 1 µm to over 500 µm.

Scriber & Metrology Equipment

The SUSS MicroTec Mask Aligner has become synonymous with superior quality, high alignment accuracy, and sophisticated exposure optics. SUSS MicroTec offers a complete range of mask aligners for high-end fab automation, high volume production and R&D environments alike.

Photomask Equipment

SUSS MicroTec’s established suite of photomask processing equipment covers the full range of technology nodes, including next-generation lithography of 1x half-pitch ranges from stripping and cleaning to post-exposure bake and developing processes.

Wafer Bonder & Cleaner

SUSS MicroTec’s wafer bonding platforms combine more than sixty years of microstructuring experience with solid product quality and a broad range of productivity features. Our platforms cover many different applications in 2.5D and 3D integration, MEMS, LED and power devices as well as other area of research and development.

Data, design and specification of custom built machines depend on individual process conditions and can vary according to equipment configurations. Illustrations on this website are not legally binding.

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