We have published a whitepaper on “PFAS-Free UV Imprint Lithography for Microlens Fabrication with Low TTV on 300 mm Wafers,” developed in collaboration with DELO. It demonstrates how a new, sustainable UV imprint process—combining innovative DELO stamp and resist materials with advanced SUSS equipment—enables fast, stable, and highly uniform microlens fabrication for large-scale optical manufacturing.
Download the whitepaper here.
