MaskTrack Pro Series

Photomask processing for next-generation lithography

MaskTrack Pro Series is designed to balance the most stringent conditions of 193i 1x nm half-pitch (hp) DPT, extreme-ultraviolet lithography (EUVL) and nanomprint lithography (NIL) processing with innovative techniques to maximize mask performance.

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Engineered for next-generation lithography requirements

With mask integrity playing a greater part in the success of advanced lithographic processing, MaskTrack Pro Series is the only platform that is specifically designed in respect to EUVL.

Modular Architecture

It is extendable to allow tool clustering with third-party products for a holistic approach to storage, handling and processing of the mask in a fully-controlled and ultra-clean environment.

Industry's leading choice

With its highest first pass cleaning yield, MaskTrack Pro Series has been accepted as the platform of choice in the industry.

Industry-Compliant Processing

Engineered for seamless integration, the Masktrack Pro Series meets stringent industry standards. It is SEMI S2, S8, and S13 compliant, CE marked, and built for a DIN EN ISO 14644 Class 2 controlled environment. With a standard SECS/GEM 200/300 mm interface, it's ready for immediate factory automation.

Tailored to needs of the semiconductor market

Key features of the Masktrack Pro Series

With mask integrity playing a greater part in the success of advanced lithographic processing, MaskTrack Pro Series is the only platform that is specifically designed in respect to EUVL.

Lowest-Defect Developing

The A+ nozzle dispense system distributes developers evenly across the entire mask for fast and uniform surface wetting and media exchange – ensuring minimal defects and optimum quality.

ASONIC-Technology®

Acoustic streaming for superior development: By using MegaSonic energy to excite the surface, the ASONIC-Technology® increases developer media exchange for uniform utilization and improved CD uniformity.

Latest Cleaning Technologies

Dual megasonic and high-pressure Fulljet, brush cleaning, as well as in-situ SC1/SPM, UV dry cleaning, ultra-clean DI processes, backside rinsing and ESD-safe options: the Masktrack Pro Series offers sophisticated cleaning technologies compliant with modern cleanroom requirements.