Coating Solutions

AS8 Manual Spray Coater for High Topographies

Patterning across challenging topographies: the AS8 manual spray coater is the ideal solution for R&D and low-volume production of substrates up to 200 mm and square substrates up to 6" edge length. The compact system combines smart usability with SUSS coating technology for uniform, reproducible coatings.

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Consistent, reliable coating – on any topography

The AS8 provides uniform, conformal resist deposition over even the most demanding 3D structures. Seamlessly integrate programmable spray and cleaning parameters, simplify complex coating and enhance yield – all this in a compact footprint designed for R&D and low-volume manufacturing excellence.

Perfect Coatings for Complex Shapes

Pattern reliably across the most challenging surface structures: the AS8’s precision spray technology overcomes extreme topography and enables uniform layer formation on complex substrates.

Unmatched Coating Uniformity

Deliver conformal coatings with precise edge coverage that avoids resist accumulation in trenches ensuring clean lines and consistent microstructure protection across your entire substrate.

Proprietary Spray Design

Benefit from process stability and repeatability powered by SUSS’s exclusive spray design, engineered for consistent, reliable results batch after batch – ideal for demanding research and pilot production.

Key Features of AS8 Manual Spray Coater

Fully configurable coating performance

The AS8 is engineered for flexibility and precision at the substrate level especially for research and pilot production. The sophisticated resist supply system and programmable recipes enable tailored process control across all common wafer and substrate formats and seamless future scaling.

Substrate Flexibility

Adapt instantly to changing requirements for both round and square plates up to 6”: choose the dual-nozzle mode for Ø150 mm and Ø200 mm substrates, or single-nozzle for Ø3’’, Ø100 mm, Ø150 mm and Ø200 mm substrates.

High-Precision X/Y Stage With Advanced Spray Nozzles

Benefit from a precise z-axis adjustment range up to 45 mm and nozzle adjustment from 67.5 mm to 107.5 mm for tailored process geometries. With spray axis velocities up to 500 mm/s and acceleration up to 9 m/s², the AS8 offers pinpoint coating and reproducibility. The dual spray nozzles and the separate solvent nozzle allow for precise, flexible cleaning and fast recipe execution.

Chuck Rotation up to 1,000 rpm

For optimal resist distribution and seamless processing, the AS8 features an optimized chuck and bowl with a maximum rotation speed of 1,000 rpm. The heated chuck option and advanced splash-ring design minimize contamination and support smooth operations.