Coating Solutions

ECD8 Semi-Automated Coater or Developer

The ECD8 combines flexibility, safety, and ease of use in one compact system for substrates up to 200 mm. Available as coater or developer with customizable configurations, the system is the ideal choice for both R&D and small-scale production.

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Effortless control

Experience the ECD8’s smart design: from effortless wafer centering to full process visibility, every detail is tailored to simplify workflows, save space, and keep operators safe in daily operation.

One-Hand Operation

Wafers can be centered quickly and accurately with a simple rotary knob and slip clutch. As the centring device covers all round wafer sizes universally, consistent alignment without the need for complicated adjustments is ensured.

Compact Design, Small Footprint

Easy installation, preserved cleanroom space: Due to the integrated media cabinet, all required media are housed directly inside the system. Without additional external cabinets operators benefit from a tidy, all-in-one setup.

Complete Process Visibility

The 360° transparent hood provides a clear view of the entire process at all times. Operators can monitor every step in real time, adding confidence and control without interrupting workflows.

Industry-Leading Safety Standards

The ECD8 is equipped with the highest safety features as standard. This ensures maximum protection for both operators and substrates, giving you peace of mind with every run.

Easy-to-Use Interface

The intuitive, symbol-based interface makes operation straightforward, even for new users. With simple navigation and clear process control, the system minimizes training effort and maximizes productivity.

Key features of ECD8 Semi-Automated Coater or Developer

Consistent, high-quality results

The ECD8 provides precise control for a wide range of processes. High spin speeds, powerful acceleration, programmable recipes, and support for resists up to 4,000 cp ensure reproducible results you can rely on.

Spin Speed Up to 8,000 rpm, Acceleration up to 10,000 rpm/s

Achieve uniform coatings with spin speeds up to 8,000 rpm. With acceleration up to 10,000 rpm/s, the ECD8 delivers fast, controlled coating dynamics ideal for a wide range of applications.

Viscosities up to 4,000 cps

Process a wide viscosity range: the ECD8 accommodates up to two proven dispense lines and pump configurations for material viscosities from <1 cps to 4000 cps.

200 Custom Recipes

Save time, simplify operations and ensure repeatability: store up to 200 recipes with 40 steps each in one system for repeatable, efficient workflows.