Stamp fabrication tool

UV-SFT Series Stamp Fabrication Tool

The UV-SFT series is SUSS's compact table-top tool for fast, precise fabrication of high-quality working stamps for micro- and nanoimprint lithography. Designed to complement MA/BA Gen4 Series 8″ mask aligners, it delivers consistent results for R&D and high-volume manufacturing across LEDs, MEMS/NEMS, micro-optics, AR, and optoelectronic sensors.

Talk to an expert

High-quality stamp fabrication in record time

Accelerate stamp fabrication with powerful UV-LED curing, cutting process times from hours to minutes: the UV-SFT series delivers exceptional light uniformity ensuring consistent quality, while compatibility with various UV-curable materials and an optional puddle dispense system reduce waste and boost process reliability.

Fast Curing, Flawless Results

Proven UV-LED exposure technology slashes curing time from hours to minutes while maintaining ±2.5% light uniformity. The results are consistently cured, high-quality stamps with excellent structural precision and reproducibility.

Flexible Material Compatibility

The UV-SFT series supports a wide range of UV-curable materials for seamless integration into R&D and production workflows. Ideal for MEMS, micro-optics, and sensors, the system ensures flexibility and reliable results across applications.

Future-Proof Flexibility

Field-upgradable from thermal to UV-LED technology, the UV-SFT series adapts to evolving process needs without new equipment. Designed to complement MA/BA Gen4 Series 8″ mask aligners, it offers investment protection as your applications advance.

Key Features of the UV-SFT Series Stamp Fabrication Tool

Sophisticated stamps for any scale

Combining precise engineering with flexible processing for superior stamp fabrication, the UV-SFT series provides quality, efficiency, and process reliability across micro- and nanoimprint applications, supporting seamless integration from R&D to HVM.

Proven UV-LED Technology

The advanced UV-LED unit delivers 100 mW/cm² intensity with ±5% uniformity across exposure areas up to 200 × 200 mm and 200 mm round. Consistent, high-intensity curing ensures uniform stamp quality and reduces process variability for reliable results in research and production. High-intensity UV-LED curing ensures fast, homogeneous stamp fabrication with light uniformity better than ±2.5%. Proven SUSS LED technology guarantees long lifetime, low maintenance, and consistent exposure quality.

Flexible Substrate & Master Handling

Versatile configuration options: the system accommodates stamp carriers of 200 × 200 mm and 240 × 240 mm, with masters from 2″, 3″, 100 mm, 150 mm, to 200 mm, supporting diverse substrate formats and enabling seamless transition between project requirements, maximizing tool utilization.

Superior UV Light Uniformity

Exceptional ±2.5% UV light uniformity ensures consistent exposure across the entire substrate. This precision illumination eliminates edge effects and hotspots, delivering homogeneous stamp curing for superior pattern fidelity and minimal defects in high-resolution micro- and nanoimprint applications.