The SUSS MicroTec Group is a leading supplier of equipment and process solutions for microstructuring applications with seventy years of engineering experience. 

Our portfolio covers a comprehensive range of products and solutions for backend lithography, wafer bonding and photomask processing, complemented by micro-optical components.

The production of memory chips, cameras for mobile phones or tire pressure sensors – the equipment solutions of SUSS MicroTec are applied within a wide variety of manufacturing processes for applications of daily or industrial use. Customers in the semiconductor industry and related markets like Advanced Packaging, MEMS and LED appreciate our comprehensive experience in wafer processing. This makes us a valuable partner for high-volume production as well as for research and development.


Our product portfolio

Our portfolio covers a comprehensive range of products and solutions for backend lithography, wafer bonding and photomask processing, complemented by micro-optical components. 



The corporate headquarters of SÜSS MicroTec SE is located in Garching near Munich, Germany. The group encompasses production sites as well as sales offices in Asia, Europe and North America.

Garching / Germany

SUSS MicroTec Lithography GmbH
Schleissheimer Straße 90
85748 Garching
Tel.:+49 89 32007 0
Fax: +49 89 32007 162

Sternenfels / Germany

SUSS MicroTec Photomask Equipment GmbH & Co. KG
Ferdinand-von-Steinbeis-Ring 10
75447 Sternenfels
Tel.: +49 7045 41 0
Fax:  +49 7045 41 101

France (South)

SUSS MicroTec S.a.r.l.
74A Boulevard de l’Europe BP 13
69491 Pierre-Bénite Cedex
Tel.: +33 966 903 163
Fax: +33 426 999 461


SUSS MicroOptics SA
Rouges-Terres 61
Hauterive 2068

Tel. +41 32 566 44 44


SMA - Suministro De Materiales Y Asistencia S.L.
C/Caracas 6, Tres Cantos
28760 Madrid
Tel.:+34 91 8033 186
Fax: +34 91 8038 685


Inseto (UK) Limited
Unit 25 Focus Way, Andover, SP10 5NY 
United Kingdom 
Tel: +44 1264 334505
Fax: +44 1264 334449

France (North)

Electron-Mec s.r.l.
c/o Auditea, Bat. L’Imperial
2, rue Alphonse Bouffard Roupé
38500 Voiron, France

Mob: +39 333 888 23 93
Tel: +33 (0)4 7667 02 80


International Technology Corporation
7 Mikras Asias Str.
55132 Thessaloniki
Tel.: +30 23 104 47009
Fax: +30 23 104 35868


Inseto (UK) Limited
Unit 25 Focus Way, Andover, SP10 5NY 
United Kingdom 
Tel: +44 1264 334505
Fax: +44 1264 334449


20 Hamagshimim St.
PO Box 7262
49170 Petach Tikva
Tel.: +972 3 635 6650
Fax: +972 3 635 7750


Electron Mec
Via Negroli 51
20133 Milano
Tel.:+39 02 7611 0156
Fax: +39 02 7611 0243


Hilpert electronics AG
Täfernstrasse 29
CH-5405 Baden-Dätwil
Tel.:+41 56 483 25 25
Fax: +41 56 483 25 20


Inseto (UK) Limited
Unit 25 Focus Way, Andover, SP10 5NY 
United Kingdom 
Tel: +44 1264 334505
Fax: +44 1264 334449


SMA - Suministro De Materiales Y Asistencia S.L.
C/Caracas 6, Tres Cantos
28760 Madrid
Tel.:+34 91 8033 186
Fax: +34 91 8038 685

Russian Federation

Kiyevskaya str. 7
Moscow 121059 
Russian Federation
Tel.:+7 495 287 8577
Fax: +7 495 287 8577


Mr. Dejan Cvjetkovic
11000 Beograd
Republic of Serbia
Tel.: +381 11 2835 071
Fax: +381 11 2835 265

South Africa

Saetra (Pty) Ltd
625 Parkade Build. Schoeman Street
PO Box 959
South Africa
Tel.: +27 12 345 3134
Fax: +27 12 345 1465


SMA - Suministro De Materiales Y Asistencia S.L.
C/Caracas 6, Tres Cantos
28760 Madrid
Tel.:+34 91 8033 186
Fax: +34 91 8038 685


Inseto (UK) Limited
Unit 25 Focus Way, Andover, SP10 5NY 
United Kingdom 
Tel: +44 1264 334505
Fax: +44 1264 334449


Hilpert electronics AG
Täfernstrasse 29
CH-5405 Baden-Dätwil
Tel.:+41 56 483 25 25
Fax: +41 56 483 25 20

Czech Republic

SPECION s.r.o.
Budějovická 1998/55
140 00 Praha 4
Czech Republic
Tel.: +420 244 402 091
Fax: +420 244 460 379


MEMS Dis Ticaret Ltd. Sti.
2128 Sokak No. 11/1 , Mustafa Kemal Mahallesi Cankaya
06460 Ankara
Phone:+90 312 2199 401
Fax: +90 312 2199 402

United Kingdom

Inseto (UK) Limited
Unit 25 Focus Way, Andover, SP10 5NY 
United Kingdom 
Tel: +44 1264 334505
Fax: +44 1264 334449


SUSS MicroTec Inc.
220 Klug Circle
Corona, CA 92880-5409
Tel.: +1 951 817 3700
Fax: +1 951 817 0640


SUSS MicroTec (Shanghai) Co. Ltd.
Room 3703, Nanzheng Building
580 Nanjing West Rd.
200041 Shanghai
Tel.: +86 21 52340 432
Fax: +86 21 52340 430


SUSS MicroTec KK
MetLife Shin-Yokohama Bldg. 5F A-1
3-8-11 Shin-Yokohama, Kohoku-ku
Yokohama, Kanagawa
222-0033 Japan

Tel: +81 45 475 3556
Fax : +81-(0)45-474-2885


SUSS MicroTec Korea Co., Ltd.
202, 54 Metapolis-ro,
DongtanParagon 2,
Hwaseong-city, Gyeonggi-do,
18455 South Korea

Tel.: +82 31 8015 3950
Fax: +82 31 8015 3951


SUSS MicroTec (Singapore) Pte Ltd
21 Bukit Batok Crescent,
Wcega Tower, #05-70
Singapore 658065
Tel.: +65 6271 5780
Fax: +65 6570 1662


SUSS MicroTec (Taiwan) Co., Ltd.
8F-11, No. 81, Shui-Lee Rd.
300 Hsinchu
Tel.: +886 351 690 98
Fax: +886 351 692 62    


Coltronics Systems Pty., Ltd.
Unit 6, 15 Meadow Way,
Banksmeadow.  NSW 2019
Tel.: +61 4 2450 2789

Hong Kong

Micro-Power (H.K.) Semiconductor Ltd.
Flat 1712, 17/F., Metropole Square, 2 On Yiu Street, Shatin, N.T.
Hong Kong
Hong Kong
Tel.: +852 2632 7784
Fax: +852 2632 7005


Indo French High Tech Equipment
308, 3rd Floor, Woodrow Building, Veera Desai Road, Andheri (West)
Mumbai - 400 053
Tel.:+91 22 4095 3901
Fax: +91 22 4023 2113


OMScientific Private Limited
A/2 Runwal Paradise, Right Bhusari Colony,
Paud Road, Kothrud,
Pune 411038, India
Tel.: +91 997 051 3862
Tel.: +91 986 777 0801


Kanematsu PWS LTD.
925 Nippa, Kohoku-ku, Yokohama, Kanagawa
223-0057 Japan
Tel: +81 45 544 1811
Fax: +81 45 544 2500
Web :
Service Contact :
Sales Contact :

Korea - Mask Aligner only

Scinco Building, 627, Bongeunsa-ro, Gangnam-gu,
Seoul, 135-873, Korea
Tel.: +82 2 2143 8210
Fax: +82 2 2143 8352


ZMC Technologies Pte. Ltd.
No. 1-3-23, Krystal Point 2, Lebuh Bukit Kecil 6, Bayan Lepas
11900 Penang
Tel.: +60 4 646 4586
Fax: +60 4 646 6427


ZMC Technologies (Phils) Inc.
South Center Tower, Unit 503, 5th Floor, 2206 Market Street, Madrigal Business Park, Alabang 1770
Muntinlupa City
Tel.: +632 842 5081 | +632 842 9327
Fax: +632 842 5288


ZMC Technologies (Singapore) Pte. Ltd.
10 Ubi Cresent #05-92/93/94/95
Lobby E, Ubi Techpark
408564 Singapore


TST Trading Service Technology Co., Ltd.
68 Nguyen Van Dau St., Binh Thanh Dist.
Ho Chi Minh City
Tel.: +84 8 5500 263/5500 264 (Ext: 39)
Fax: +84 8 5500 262



Managing Board

Dr. Franz Richter

Chief Executive Officer (CEO)*

Upon completion of his mechanical engineering studies at the University of Applied Sciences at Münster as well as Physics at the University Bielefeld and the University of Applied Science Darmstadt, Dr. Richter started out on his professional career at the research and development department at Carl Zeiss. In 1988 he moved on to the research and development of the Fraunhofer Institute. Following his professional activities as a scientist at the Carl Zeiss Group and the Fraunhofer Institute, he spent 14 years working for SUSS MicroTec, the last six of them as its CEO until 2004. During this time, the IPO took place and revenue grew beyond 200 million Euro. After serving as President of Semiconductor Equipment Division at Unaxis (now OC Oerlikon) in Pfäffikon, Switzerland, he set up Thin Materials AG and became its CEO in 2007. The company is engaged in the process development for the 3D chip integration and was successfully sold to Nissan Chemical Industries, Ltd.,Tokyo, in 2013.

Today Dr. Richter serves as a member of the supervisory board of the stock listed Siltronic AG, Munich, Germany, the administrative board of Meyer Burger Technology AG, Gwatt, Switzerland and the COMET Holding AG, Flamatt, Switzerland. Additionally he is the president of the board of directors at Scint-X AB, Stockholm, Sweden.

* As of September 7, 2016, appointed until August 31, 2022

Robert Leurs

Chief Financial Officer (CFO) *

After successfully completing his studies of business administration at the University of Regensburg, Mr. Leurs began his professional career as an employee at the KPMG auditing department in Munich. There he worked for several years as a chartered accountant and tax consultant. In January 2004, he moved to the corporate side and was responsible for controlling, accounting and tax at Knorr-Bremse AG in Munich. Robert Leurs holds qualification as chartered accountant and tax consultant and has many years of relevant experience in finance, controlling, IT and legal. In the course of his professional life, he also gained extensive experience in a number of projects in the field of Mergers & Acquisitions.

Prior to his appointment to the Executive Board of SÜSS MicroTec Robert Leurs was Managing Director/CFO at Hoffmann Group in Munich.

* As of December 1, 2017. Appointed until November 30, 2020

Supervisory Board

Dr. Stefan Reineck

Chairman of the Supervisory Board*

Dr. Stefan Reineck began his career at LEYBOLD AG, an international plant construction company for the semiconductor and data storage industry, where he ultimately held the position of Division Manager for Data Storage Technology Facilities. This holder of a doctorate in physics subsequently assumed management control of Quartz Crystal Technology GmbH, a small-to-medium-sized manufacturer of equipment for the telecommunications industry. From 2002 to 2006, he served as Spokesman of the Management Board of STEAG HamaTech AG, which specializes in the production of optical storage media and photomasks. After leaving this position, he became a management consultant. From April to September 2007, Dr. Stefan Reineck was an interim member of the Management Board of SUSS MicroTec SE before joining its Supervisory Board in October 2007.

Dr. Reineck is a member of the following supervisory boards and comparable domestic and foreign boards of directors:

  • attocube systems AG, Munich, Germany
  • WITTENSTEIN SE, Igersheim, Germany
  • Phoseon Technology Inc., Hillsboro, Oregon, USA

* Member of the supervisory board since October 1, 2007. Chairman of the supervisory board since June 2009. Elected until 2022


Jan Teichert

Deputy Chairman of the Supervisory Board*

Jan Teichert began his career at a well-known accounting and auditing firm in Munich, Germany. In 1999, the business graduate transitioned from auditing to the operational business of the globally-oriented, stock exchange-listed Lindner Holding KGaA. There, he acted as authorized representative for finance and made a substantial contribution to the successful realignment of the finance department. Since January 2003, he has been a member of the Board of directors of Einhell Germany AG, where he serves as Chief Financial Officer.

* Member of the supervisory board since June 19, 2008. Deputy chairman of the supervisory board since June 2009. Elected until 2022


Gerhard Pegam

Member of the Supervisory Board*

Gerhard Pegam was President and Chief Executive Officer (CEO) of EPCOS, a world-leading manufacturer of electronic components, modules and systems, headquartered in Munich, Germany until Januar 31, 2012. He was also a Member of the Board of Directors of the holding company TDK-EPC Corporation, which was established in 2009 as a result of the merger of EPCOS with the components business of the Japanese electronics company TDK Corporation.

Gerhard Pegam looks back to almost 30 years of experience in the Electronics Industry. After graduating in electrical engineering in 1981 he started his professional career as development engineer at Philips in Austria in 1982. In 1985 he moved on to Siemens, were he held various management positions within the passive components sector. In 1999 Gerhard Pegam became a member of the Management Board of EPCOS AG, a spin off from Siemens. He assumed the position of Chief Operating Officer before he was appointed Chief Executive Officer in 2001.

Gerhard Pegam is a member of the Board of Directors of OC Oerlikon Corporation AG and Schaffner Holding AG.

* since June, 2011. Elected until 2022


Dr. Myriam Jahn

Member of the Supervisory Board*

Dr. Myriam Jahn started her professional career as consultant at the Boston Consulting Group in Duesseldorf. Later on she joined the Deutsche Gesellschaft für Mittelstandsberatung (DGM), where she specialized in strategy consulting. After her dissertation and PhD at the University of Duisburg-Essen in 2003, she moved on to the ifm-group in Essen. There, she held various responsible positions in sales and administration. From 2016 to 2018, Dr. Jahn has been a member of the Management Board of TiSC AG, a subsidiary of the ifm-group, there she was responsible for sales. Since October 2018, she is the managing director of Q-Loud GmbH, a subsidiary of QSC AG. In the supervisory board of SUSS MicroTec, Dr. Jahn is responsible for the competence areas of digitalization as well as industry 4.0 (smart factory). With her long-standing experience in these areas, she complements the existing core competences of the supervisory board with two important, up-to-date topics.

* since May 2017. Elected until 2022


Financial Figures

  in € million 2017 2016 2015  2014  2013 
 Business Development              
  Order entry 200.3 161.1 188.6   134.3   135.0  
  Order backlog as of December 31 133.4 101.5 117.6   75.6   85.7  
  Total Sales 166.5 177.6 148.5   145.3   134.5  
  Sales margin 4.0% 2.8% 0.1%   3.2%   (11.9%)  
  Gross profit 59.5 58.6 49.4 44.8 21.8
  Gross margin 35.7% 33.0% 33.3% 33.6% 16.2%
  Cost of sales 107.0 119.0 99.2   96.5   112.7  
  Research and Development costs 15.2 14.1 12.8 10.5 10.2
  EBITDA 18.0 15.3 9.2   12.6   (13.4)  
  EBITDA margin 10.8% 8.6% 6.2%   8.7%   (10.0%)  
  EBIT 13.9 11.1 5.0   8.4   (19.4)  
  EBIT margin 8.3% 6.3% 3.4%   5.8%   (14.4%)  
  Earnings after tax 6.7 5.0 0.2   4.6   (16.0)  
  Earnings per share, basic (in €) 0.35 0.26 0.01   0.24   (0.84)  
 Balance Sheet and cash flow              
  Equity 127.0 124.4 118.7   116.1   109.4  
  Equity ratio 62.9% 69.2% 67.0%   69.1%   60.8%  
  Return on equity 5.3% 4.0% 0.2% 4.0% -14.6%
  Balance sheet total 202.0 179.6 177.2   168.0   179.9  
  Net cash 33.0 31.1 40.0   38.0   35.7  
  Free cash flow1 2.9 -9.1 1.3   2.1   4.1  
 Further key figures              
  Investments 6.5 3.6 3.4   3.0   12.2  
  Investment ratio 3.9% 2.0% 2.3%   2.1%   9.1%  
  Depreciation 4.1 4.2 4.2   4.2   6.0  
  Employees as of December 31 779 711 698   659   655  

1 Before consideration of purchase or sale of availabe for sale securities


In 1949 Karl Süss founds a sales representation for microscopes, cameras and laboratory equipment of Ernst Leitz Wetzlar in Munich. A garage is the first headquarter for the new business in post-war Germany. Soon the Karl Süss GmbH also provides service and maintenance for the optical devices thus quickly gaining reputation within the research community.

When Munich-based Siemens approaches Süss in 1962 and asks the company to produce a thermo-compression bonding machine for transistors this marks a tipping point in its history: The company moves from sales and maintenance to contract manufacturing. The first order comprises small measuring tables with stereo microscopes that are bonded together. One year later a second order follows and in 1963 Süss develops the prototype for the first mask aligner, the MJB3, for Siemens.

Karl Süss and his two sons Ekkehard and Winfried successfully expand the flourishing manufacturing business. The company soon needs to move its premises outside of Munich to Garching, where headquarters are still situated today.

While the semiconductor industry grows various other business opportunities are appearing. Süss starts producing test systems and diamond scribers.

The first double-side mask aligner allowing for dual-side exposure gets invented in 1974.  Having proven itself an acknowledged expert in photolithography for its partners in research and development Süss now tackles manufacturing customers. In 1975 it introduces with the MJB55 a first mask aligner for volume production.

The eighties are marked for Süss by a worldwide expansion. Süss launches its oversea business first with a site in the US, Waterbury, Vermont. Next, an Asian subsidiary is founded in Thailand in 1983, with more sales offices in Japan, China and Taiwan to follow. 

Süss gets ready for the production of bonders, additionally undertaking a side step into the very specialized field of xray stepper lithography. In Dresden, Germany, Süss opens a production site for probers.

Süss meets the growing demands for microsystems by releasing its first substrate bonder in 1989. Substrate bonders are used in microsystem technology to join heterogenous materials with patterned surfaces. In 1993 Süss adds device bonders to its product portfolio.

In 1994 Karl Süss and his eldest son Ekkehard Süss desease shortly one after the other. This sets off a reorganisation. The company is going public in 1999.  The Süss family remains represented in the advisory board by Karl Süss' son Dr. Winfried Süss. Two years later a name change for all legal Süss entitites into SÜSS MicroTec follows the new organisational form.

By the acquisition of Fairchild Technologies the company gains access to high-end markets with production coaters in 2000. In the year 2001 the microoptics business of the newly founded SUSS MicroOptcs reinforce the lithographic portfolio. In 2006 SÜSS MicroTec establishes its spin-off SUSS MicroTec Reman in the flourishing used equipment market. In 2007 the product line device bonders is sold, two years later the probers. In contrast, the opening of offices in Singapore and Korea strengthen the company's presence in the Asian market.

The recent years are characterized by focussing on core compentencies. In 2010 SÜSS MicroTec purchases Hamatech APE, an equipment supplier for photomask processing technology. In the same year, the newly purchased site in Sternenfels becomes home for the production of substrate bonders which have been moved from Waterbury, US. Coaters, bonders and photomask processing equipment are now being manufactured at the same site which therefore functions a compentence center for wet processing technology. With the acquisition of Tamarack Scientific in 2014 the company complements her lithographic portfolio with modern laser processing technology for microstructuring.



SUSS MicroTec is regulary participating in trade fairs and conferences all around the world. Meet our experts and address questions about materials, equipment and processing of your application.

SUSS Technology Forum 2019
3月. 20. - 3月. 20, 2019 | Shanghai, China

Advanced Photomask Solutions Toward 14 nm and 10 nm

You are cordially invited to the SUSS Photomask Workshop taking place at the Jumeirah Himalayas Hotel at 8:30-12:30 on Wednesday, March 20, 2019, the morning during the 1st day of SEMICON China.

World renowned experts from the mask industry including DNP, FujiFilm, Mitsui Chemical, NuFlare, Photronics, Zeiss and SUSS MicroTec will give their perspectives on challenges and solutions beyond 14 nm - 10 nm mask fabrication and maintenance inside wafer fabs. This workshop will also provide opportunities to network with peers within the photolithography and -mask community.



Moderator: Yuan Zhang, Director Photomask Equipment, SUSS MicroTec Inc.

08:30 am Opening Remark
Dr. Franz Richter, CEO
08:30 am Multi-Beam Mask Writer for Advanced Patterning
Naoya Hayashi, Research Fellow, DNP
09:00 am

Enabling Wafer Solutions Through Mask Collaboration
Angus Chin, Associate VP, Photronics

09:25 am NuFlare VSB Mask Writers for 14 nm and 10 nm Technology Node
Hideki Matsui, Group Manager, NuFlare
09:45 am Advanced Acoustic Streaming Technology for Mask Bake and Develop
Manfred Zimmermann, Product Manager, SUSS MicroTec
10:05 am Current Status and Prospect of EB Resist for 14 nm and 10 nm Mask Application
Koji Shirakawa, R&D Manager, FujiFilm
10:25 am

Advanced Mask Cleaning Reducing Pattern and Surface Damage
Uwe Dietze, Senior Director, SUSS MicroTec

10:45 am Coffee Break
11:00 am Mask Pellicle Development for 14 nm and 10 nm
Daiki Taneichi, Senior Researcher, Mitsui Chemical
11:20 am Local Pellicle Glue Removal Eliminating Need for Aggressive Final Clean
Dr. Davide Dattilo, Process Scientist, SUSS MicroTec
11:40 am E-beam and Defects – a Superlative Nano Playground
Dr. Markus Waiblinger, Senior Product Manager, Carl Zeiss
12:00 pm Mask Pattern Defect Inspection Tool Technology
Yoshitaka Yasui, Group Manager, NuFlare
12:20 pm Closing Statement
Yuta Nagai, General Manager, SUSS MicroTec
12:30 pm End of Forum

The content is subject to change.

3月. 20. - 3月. 22, 2019 | Shanghai, China | #1531

Visit us at SEMICON China 2019 in Shanghai, China and discuss developments and future directions on 3D technology. Meet our experts and address questions about materials, equipment and processing of your application for the 3D Integration, Advanced Packaging, MEMS, Nanotechnology and Compound Semiconductor market.

NIL Industrial Day
3月. 28. - 3月. 29, 2019 | Aachen, Germany

Visit SUSS MicroTec at NIL Industrial day in Vienna, Austria and discuss latest developments and future directions of nano imprint lithography equipment manufacturing. Meet our experts and address questions about materials, equipment and processing of your application. We do not have a booth but are experts will be there. Contact us to arrange a meeting