SD12 Developer & Cleaner

手动12英寸金属剥离系统

SD12系统是先进的液体旋转工艺系统,内嵌多种溶液分配模块,例如高压喷淋(压力最大120bar)和用于降低成本的媒质回收系统等。该系统可满足12英寸(300毫米)圆片、9英寸×9英寸(230毫米×230毫米)方形基片和掩模的工艺需求,包括NMP剥离、显影(包括丙酮及其它溶液)、光刻胶去除和和清洗等应用环境。该系统也可以处理易碎的基片(例如磷化铟和砷化镓),并拥有极高的良率。

亮点

金属剥离、显影、清洗和去胶

转速最高4000转/分钟

可编程工艺菜单

SUSS MicroTec Coater SD12

Superior Flexibility

The SD12 demonstrates its versatility by handling many different kinds of substrates using optimized chucks. Even fragile substrates (e.g. InP, GaAs) can be securely processed. Special tooling and an extensive range of easily adjustable process parameters make the SD12 suitable for many process applications involving solvent media. With the ability to program parameters such as step time, spin speed, acceleration and deceleration, dispense arm position and swivel movement the system allows for an optimized process flow resulting in reproducible and stable process results. Equipped with SUSS MicroTec’s sophisticated dispense technologies the SD12 efficiently supports development, lift-off and cleaning.

Sophisticated Dispense Technologies

The SD12 offers a broad range of dispense technologies for different process needs. A wide range of processes can be run: from a simple puddle or spray development to lift-off that requires, besides puddle dispense for soaking and final rinse, a high-pressure to lift off the resist and the metal. Special applications such as cleaning of adhesives from wafers mounted on tape frame that may require the support of a mega-sonic transducer for optimal cleaning results can also be performed. All of the above mentioned dispense technologies can be configured at the dispense arm of SD12.

Intelligent Solvent Based Media System

The SD12 is tailored for the special needs of handling solvent-based media. All parts coming into contact with process chemicals are made of unsusceptible materials. The drain can be connected to the house drain or to waste canisters.

Media are safely stored in a media storage equipped with exhaust connection and secured by solvent leakage detector and a gas sensor. Flow control systems and pressure regulators manage the media. Optionally, the media temperature can be controlled to secure optimal process results. A recirculation system for the media can be installed in order to reduce overall media consumption.

Easy and Safe Operation

The SD12 is easy to operate and maintain. Process parameters and media data can be recalled at the push of a button. Programmable recipes accelerate workflow and facilitate repeatability. All parts are easily accessible for convenient operation and maintenance of the tool. Moreover, the tool was designed with a primary focus on operator safety. A sealed process chamber with an automatic safety glass door ensures an enclosed process environment and facilitates monitoring of the process. Interlock sensors guarante the safe operation of the tool.

  • Solvent developing
  • Lift-off
  • Temporary bond adhesive cleaning
  • Fan spray
  • Puddle
  • High-pressure
  • Binary
  • Mega-sonic transducer
Downloads
SD12 Datasheet 631kb
SUSS Product Portfolio 990kb

技术文件

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