SUSS MicroTec offers a wide product portfolio of high quality process solutions for the semiconductor industry and related markets. Our portfolio covers a comprehensive range of products and solutions for backend lithography, wafer bonding and photomask processing, complemented by micro-optical components. The quality guarantee extends to our remanufactured products and service.
Advanced research inkjet printer
Inkjet printer for PCB manufacturing
Inkjet printer for mass production
Advanced industrial inkjet printer
Automated Platform for Wafers of up to 300mm
Automated Platform for Wafers of up to 300mm
Automated Platform for Wafers up to 200mm
Manual Spray Coater for High Topographies
Resist Coat and Develop Platform
Labcluster for laboratories, start-ups and small-scale production
Laboratory Spin Coat and Develop Solution for Wafers up to 150 and 200 mm
Flexible Solution for Aqueous Development and Cleaning
Flexible Solution for Solvent Development and Cleaning
Highly Automated Platform for 300mm and 200mm Wafers
Alignment and Exposure for a Multitude of Applications
Automated Platform for Wafers up to 100mm or 150mm
Semi-automated mask aligner for wafer sizes of up to 12"/300 mm
For Industrial Research and Operator-Assisted Production
Semi-Automated Platform for Wafers up to 8"/200mm
State-of-the art R&D Solution for Small Substrates and Pieces
Alignment Measurement for Double-sided Substrates
Automated Platform for Wafer Sizes up to 200 mm
Automated Platform for Wafer Sizes up to 300 mm
Universal Temporary Wafer Bonder for High Volume Manufacturing
Manual Bond Aligner Wafer Sizes up to 8"/200 mm
High Precision Bond Aligner
Semi-Automated Excimer Laser Debonder
Semi-automated Tool for Permanent Wafer Bonding of Wafers up to 8"/200 mm
Universal High-Force Wafer Bonder
Next-Generation Lithography | Clean, Bake and Develop
Photomask Processing Plattform for Advanced Bake, Resist Strip & Clean and Develop
Manual Photomask Equipment with Fully Automated Processing
High-Quality Micro-Optics
Pre-owned and Certified