Remanufactured Equipment


当社のウェーハ処理装置は、長期間ご利用いただけるように念入りに設計されています。このため、15年以上の稼動もまったく珍しいことではありません。これは、当社装置の良好な投資収益率の証です。ズース マイクロテック製の装置では、年月を経ても変わらぬ品質、信頼性、耐久性をお楽しみいただけます。世界の半導体業界では、1999年のIPO(新規株式公開)後にズース マイクロテックとなったカール ズース社製の装置がいまだに使用されています。

年々増え続けるリマニュファクチャーされた使用済み製品の需要。ズース マイクロテックのリマニュファクチャー部門では、ズース マイクロテックのリマニュファクチャードブランドのシステムをお届けすることで、このような需要に専門的に対応させていただいています。リマニュファクチャードブランドのシステムは、古い世代の既存システムにある装置を生産設備に追加し既存プロセスを確実に移転することで生産設備の拡大を検討しているお客様に最適の製品です。


使用済み製品の再生は、多くの場合、いくつかの純正コンポーネントのみを使用したリファービッシュです。これに反し、当社のリマニュファクチャリングサービスには、すべてメーカー指定の純正部品を使用したことを保証する特別保証が付いています。さらに、元の状態を回復するために使用済み装置の大規模なオーバーホールが実施されます。これが競合他社の再生半導体製造装置とズース マイクロテック製のリマニュファクチャード製品の大きな違いを生み出しています。


ズース マイクロテックが提供するすべてのリマニュファクチャード製品は、品質と精度の高い基準を満たしています。装置は、それぞれ、元の仕様と性能データを基に準備されます。



Six-month warranty

Safety feature updates

Pre and final acceptance tests 

Phone support and on site field service

Long term spare part availability

Complete documentation


We offer remanufactured equipment for semiconductor production and microstructuring from the complete line of SUSS MicroTec products. This includes currently available equipment as well as machines that after serving our customers reliably for many years have been remanufactured and certified. You will find a selection of such machines at the bottom of the page. 

For R&D departments and institutions, we also offer reasonably priced manual equipment for initial needs.

We are looking forward to your request!

Product Listing


Equipment that has been professionally remanufactured by our engineers conforms with the same quality standards as applied to the original machine. Our OEM certificate of authenticity guarantees it.

It is a priority concern for us that your remanufactured equipment is safe. Every remanufacturing process always includes a complete inspection of all safety issues as well as an acceptance test. It goes without saying that all approved equipment conforms with currently applicable safety requirements.

Each piece of remanufactured equipment is supplied with a complete set of original technical documents. This includes a User Manual, Service Manual, Safety Instructions as well as a CD-ROM with diagrams of electronic and pneumatic systems.

At the customer’s request, we add features to enhance performance, making the remanufactured equipment for wafer processing compatible with the most advanced technical requirements. Such features include software updates or our newest optics designs (e.g. MO Exposure Optics). 

Save time and money. At the customer’s request we modify the system to be compatible with the customer's system environment. This minimizes spare part inventory and time for the process integration of the additional system and eliminates any need for operator training.

Trained, qualified staff is at your service for inspections, maintenance and repairs of remanufactured equipment. A team of highly qualified service engineers is on duty all over the globe. The services we provide for SUSS MicroTec remanufactured equipment are exactly the same as for new machines.

  • Technical advice and spare part identification on the phone
  • On site service and technical support
  • Preventive maintenance program
  • Complete Documentation 

For your remanufactured equipment, we offer original spare parts by SUSS MicroTec or OEM parts. All materials used conform to quality standards and meet the most stringent requirements.

Selling used equipment is a simple way of making room for a new machine or of meeting short-term liquidity needs. Finding a buyer is often a tedious task that we are happy to relieve you of: simply offer your used SUSS machine to us. We provide a professional estimate of equipment value and pay you a competitive market price.

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