- マニュアル 手動機
- 全自動搬送 プロダクション装置
SUSS MicroTec’s semi-automated wet-processing system AD12 offers superior cleaning and developing functions for aqueous media applications. The single-wafer processing platform serves pieces, wafer sizes up to 300 mm, square substrates up to 230 x 230 mm and tape frames for wafers up to 300 mm. Its ability to handle various media and processes gives the flexibility needed for switching between applications and makes the tool first choice for research environment and small scale production.
Specially designed for aqueous processes
Excels in process versatility with a wide range of dispense technologies
High safety standards
The AD12 demonstrates its versatility by being able to handle many different kinds of substrates using optimized chucks. Even fragile substrates (e.g. InP, GaAs) can be securely processed. Special tooling and an extensive range of easily adjustable process parameters make the AD12 suitable for many process applications involving aqueous media. With the ability to program parameters such as step time, spin speed, acceleration and deceleration, dispense arm position and swivel movement the system allows for an optimized process flow resulting in reproducible and stable process results. Equipped with SUSS MicroTec’s sophisticated dispense technologies the AD12 efficiently supports development and cleaning.
The AD12 offers a broad range of dispense technologies for different process needs. A wide range of processes can be run: from a simple puddle or spray development to lift-off that requires, besides puddle dispense for soaking and final rinse, a high-pressure to lift off the resist and the metal. All of the above mentioned dispense technologies can be configured at the dispense arm of AD12.
The AD12 is tailored for the special needs of handling aqueous media. All parts coming into contact with process chemicals are made of unsusceptible materials. The drain can be connected to the house drain or to waste canisters.
Media are safely stored in a media storage equipped with exhaust connection and secured by leakage detector. Flow control systems and pressure regulators manage the media. Optionally, the media temperature can be controlled to secure optimal process results. A recirculation system for the media can be installed in order to reduce overall media consumption.
The AD12 is easy to operate and maintain. Process parameters and media data can be recalled at the push of a button. Programmable recipes accelerate workflow and facilitate repeatability. All parts are easily accessible for convenient operation and maintenance of the tool. Moreover, the tool was designed with a primary focus on operator safety. A sealed process chamber with an automatic safety glass door ensures an enclosed process environment and facilitates monitoring of the process. Interlock sensors guarantee the safe operation of the tool.