客戶雜誌

SUSS 報告

We are happy to share with you the latest issue of our customer magazine „SUSS report“.

Our customer magazine SUSS report provides you with an insider update on innovations and trends in equipment solutions for the semiconductor and related industries. You will find exciting technical publications as well as practice-oriented reports and personal notes by experts of the industry.
Have a look in our latest SUSS report issue as well as in our archive. The articles are also available as technical publications.

The 2016 annual edition is also available as hardcopy. Contact us for a free copy.

Article of the SUSS report issue 2018:

SUSS DISPENSE SYSTEM – AUTO CALIBRATION / SELF LEARNING


The SUSS Dispense System (SDS) is a pressure based dispense system, which is used to dispense chemicals for coating and developer processes with a repeatability of ± 1% and an absolute accuracy of ± 2%. The system setup uses standard components and intelligent software algorithms to achieve precise dispense results.

To optimize this a new automated calibration and self-learning / self-optimizing algorithms needed to be evaluated and implemented, to simplify the system setup and maintenance in the field and also to improve the cost of ownership.

Now in the new update, the system intelligence is improved further with the complexity being taken away from the user. Thus, the system is more intelligent, more stable and with reduced tolerance to errors, and offers significant reduction in time and effort for setup and calibration.
 

 

Issue 2017:

The 2017 annual edition is also available as hardcopy. 

Contact us for a free hard copy.