Technical Publications
- Automated
- Semi-Automated and Manual
- Manual
- Automated
- Semi-Automated
- Manual
- Automated Systems
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- Automated Systems
SUSS MicroTecs ASx 系列为加工光掩模和 250 nm 至 90 nm 技术节点提供了先进的烘烤、显影和清洁方法。其可靠性、稳定性和高性能使平台能够满足无损加工光掩模的要求,用于 248 nm 和 193 nm 光刻工艺。
最佳的第一遍清洗效果,从而延长光掩模的使用寿命
占地面积小(1200 x 1200 mm),低总体拥有成本
高可靠性和可用性
More than 250 ASx Sold
State of the Art Advanced Bake - Qualified down to 14 nm Node and beyond
The ASX ensures 100% soft defect removal, careful PSM cleaning and minimal residual ions during critical cleaning stages:
Multiple Technologies
Product Highlights
In Line with the Industry
Superior Performance
State-of-the-art fully automated mask bake and chill system, valuable to different applications like