SUSS MicroTec and NuFlare Technology agree on collaboration

PRESS RELEASE

SUSS MicroTec and NuFlare Technology agree on collaboration

Yokohama, JAPAN and Garching, GERMANY, January 20th, 2015 - NuFlare Technology, the market leader in electron-beam mask writers and SUSS MicroTec, a global supplier of equipment and process solutions for the semiconductor industry and related markets, announced today a cooperation to combine their expertise in Photomask Equipment and process solutions. NuFlare Technology will install a SUSS MicroTec MaskTrackPro bake and develop system into their main manufacturing fab, in Yokohama, Japan, in early 2015. The MaskTrackPro system is designed and manufactured to meet the most demanding requirements for masks used in NGL (Next Generation Lithography), such as EUVL (Extreme-Ultraviolet Lithography), 193i extension and NIL (Nano-Imprint Lithography). Since its release by SUSS MicroTec in 2010, more than 30 systems have been shipped to customers worldwide. NuFlare Technology and SUSS MicroTec will jointly work on advanced process solutions, closely integrating the latest NuFlare EB-writer, EBM-9000 and MaskTrackPro.

'In the semiconductor industry, equipment suppliers are responsible for a smooth and fast start-up of their systems into production.', says Yuta Nagai, General Manager of SUSS MicroTec Photomask Equipment. 'Our valuable partnership with NuFlare allows both companies to provide solid turn-key equipment and technology solutions to mask makers worldwide.'

'Integration between mask writer and develop system is indispensable to accommodate a tighter accuracy request from our high-end customers. I believe the collaboration between SUSS MicroTec and NuFlare will allow us to give them the solution.', says Fumiaki Shigemitsu, President of NuFlare Technology, Inc.

About NuFlare Technology, Inc.
NuFlare Technology, Inc. was founded in 2002 as a spinoff of the Semiconductor Equipment Business Division of Toshiba Machine Co., Ltd. Since then, NuFlare has been active in the development, manufacture, and sale of electron beam mask writers, mask inspection systems, and epitaxial growth systems, all devices essential in the drive toward shrinking physical dimensions and growing sophistication of semiconductor devices. For more information, please visit http://www.nuflare.co.jp/english/

Contact:
Hirohito Anze, NuFlare Technology, Inc
anze.hirohito@nuflare.co.jp
+81-45-370-9244

About SUSS MicroTec
SUSS MicroTec is a leading supplier of equipment and process solutions for microstructuring in the semiconductor industry and related markets. In close cooperation with research institutes and industry partners SUSS MicroTec contributes to the advancement of next-generation technologies as well as key processes for MEMS and LED manufacturing. With a global infrastructure for applications and service SUSS MicroTec supports more than 8.000 installed systems worldwide. SUSS MicroTec is headquartered in Garching near Munich, Germany. For more information, please visit http://www.suss.com.

Contact:
Franka Schielke, SÜSS MicroTec AG
franka.schielke@suss.com
+49 89 32007 161