Auto-Alignment Insights — Part 2: Case Studies
This article is the second part of the short series of articles which started in issue 01/2013 of this magazine. The series focuses on pattern recognition and alignment in SUSS mask aligners. It is meant as a guideline, especially for beginners in the field of pattern recognition, but even more experienced users might find one or the other aspect of pattern recognition that is new to them. This second part of the series highlights the most common alignment reliability issues using case studies. Based on the analysis of the cases, promising measures to improve the alignment reliability in such cases are suggested.
See also: Auto-Alignment Insights — Part 1