SUSS MicroTec relies on eco-friendly LED-Technology for Mask Aligner

SUSS MicroTec relies on eco-friendly LED-Technology for Mask Aligner

DGAP-Media / 2016-04-26 / 10:45

SUSS MicroTec relies on eco-friendly LED-Technology for Mask Aligner

Garching, April 26, 2016 - SUSS MicroTec, a leading supplier of equipment and process solutions for the semiconductor and related markets, today announced the launch of a new UV-LED lamp house for use in its first exposure tools, which have a leading position in the market for more than fifty years. SUSS MicroTec strives to bring sustainability and economic thinking in line with ecological aspects. With the development and implementation of the environmentally low impact UV-LED lamp house concept for Mask Aligner, SUSS MicroTec has taken a further important step in terms of resource conservation and environmental protection.

The new UV-LED light source has a much longer life than conventional mercury vapor lamps. Moreover, it no longer needs warm-up and cool-down - the LED light source is only switched on during the actual exposure process. Both factors contribute to low energy consumption. In terms of health, safety and environmental protection, the LED technology provides a significantly improved solution. Finally, the use of LED lighting in lithography provides for maximum flexibility in process design. It is therefore an ideal addition to the SUSS Mask Aligner MO Exposure Optics which ensures optimal exposure results.

"The new LED lamp house features the latest in technology and thus meets the growing demand for environmental sustainability and energy efficiency.", says Dr. Per-Ove Hansson, CEO of SUSS MicroTec. "By combining leading edge innovations with our environmental strategy we not only create cost benefits for our customers but also protect the environment."

About SUSS MicroTec
SUSS MicroTec is a leading supplier of equipment and process solutions for microstructuring in the semiconductor industry and related markets. In close cooperation with research institutes and industry partners SUSS MicroTec contributes to the advancement of next-generation technologies such as 3D Integration and nanoimprint lithography as well as key processes for MEMS and LED manufacturing. With a global infrastructure for applications and service SUSS MicroTec supports more than 8.000 installed systems worldwide. SUSS MicroTec is headquartered in Garching near Munich, Germany. For more information, please visit

SUSS MicroTec AG
Franka Schielke
Schleissheimer Strasse 90
85748 Garching, Deutschland
Tel.: +49 (0)89 32007-161
Fax: +49 (0)89 32007-451

End of Media Release

Issuer: SÜSS MicroTec AG
Key word(s): Research/Technology

2016-04-26 Dissemination of a Press Release, transmitted by DGAP - a service of EQS Group AG.
The issuer is solely responsible for the content of this announcement.

The DGAP Distribution Services include Regulatory Announcements, Financial/Corporate News and Press Releases.
Media archive at and

show this