Photomask Equipment

Compelling Through Highest Mask Integrity

Each introduction of a new technology node necessitates the development of innovations in photomask processing. SUSS MicroTec works in close cooperation with customers, technology partners, and OEMs to completely understand the requirements of its customers in mask shops and wafer fabs and to deliver solutions that guarantee the highest level of mask integrity.

SUSS MicroTec’s established suite of photomask processing equipment covers the full range of technology nodes, including next-generation lithography of 1x half-pitch ranges from stripping and cleaning to post-exposure bake and developing processes.


  • Photomask Cleaning
  • Surface Preparation
  • Surface Purification and Preservation
  • Wet Cleaning