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The ASx series is SUSS MicroTec’s fully-automated photomask processing platform for 250 nm to 65 nm technology nodes with advanced bake (qualified down to 14 nm node and beyond), clean, develop and etch technologies. The series offers reliability, stability and performance to meet critical challenges of defect-free processing of masks exposed to 248 nm and 193 nm lithography.
Highest first pass cleaning yield, resulting in extended mask life
Low cost of ownership with small footprint (1200 x 1200 mm)
High reliability and uptime
More than 250 ASx Sold
State of the Art Advanced Bake - Qualified down to 14 nm Node and beyond
The ASX ensures 100% soft defect removal, careful PSM cleaning and minimal residual ions during critical cleaning stages:
In Line with the Industry
State-of-the-art fully automated mask bake and chill system, valuable to different applications like