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The ASx series is SUSS MicroTec’s photomask processing platform for 250nm to 90nm technology nodes with advanced bake (qualified up to current technology node), clean, develop and etch technologies. The series offers reliability, stability and performance to meet critical challenges of defect-free processing of masks exposed to 248nm and 193nm lithography.
Highest first pass cleaning yield, resulting in extended mask life
Low cost of ownership with small footprint (1200 x 1200mm)
High reliability and uptime
More than 250 ASx Sold
State of the Art Advanced Bake - Qualified up to Current Technology Node
The ASX ensures 100% soft defect removal, careful PSM cleaning and minimal residual ions during critical cleaning stages:
In Line with the Industry
Physical- and chemical-based Cleaning