The SUSS MicroTec Group is a leading supplier of equipment and process solutions for microstructuring applications with seventy years of engineering experience. 

Our portfolio covers a comprehensive range of products and solutions for backend lithography, wafer bonding and photomask processing, complemented by micro-optical components.

The production of memory chips, cameras for mobile phones or tire pressure sensors – the equipment solutions of SUSS MicroTec are applied within a wide variety of manufacturing processes for applications of daily or industrial use. Customers in the semiconductor industry and related markets like Advanced Packaging, MEMS and LED appreciate our comprehensive experience in wafer processing. This makes us a valuable partner for high-volume production as well as for research and development.


product portfolio

Our portfolio covers a comprehensive range of products and solutions for backend lithography, wafer bonding and photomask processing, complemented by micro-optical components. 

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Managing Board

GOETZ M. Bendele

Chief Executive Officer (CEO)

Goetz M. Bendele (born 1970, German citizen) received his PhD in physics from Stone Brook University, NY (USA) in 1998. He then worked for one year as a Post-Doctoral Researcher (physics) at Los Alamos National Laboratory, Los Alamos, NM (USA). In 2000, he joined McKinsey & Company as a management consultant. There he worked in Berlin, Hamburg, Palo Alto, CA (USA) and Taipei (Taiwan) from 2000 to 2009. Before his appointment as CEO of LPKF Laser & Electronics AG from 2018 to 2021, he held various management positions. Goetz M. Bendele was partner at Infosys Limited in Seattle (USA), where he was responsible for the consulting business of technology companies on the US West Coast. Prior to that, he was Managing Director of the European solar business of chip manufacturer TSMC. Goetz M. Bendele holds a doctorate in physics and, in addition to extensive sales and management experience, has extensive knowledge in the fields of technology, product innovation and product development. He has many years of experience in the semiconductor, electronics and solar industries, complemented by almost ten years of consulting experience for high-tech companies in Europe, the USA and Asia as a management consultant at McKinsey & Company. He is not a member in statutory supervisory boards or other domestic and foreign supervisory bodies of commercial enterprises. 

Oliver Albrecht

Chief Financial Officer (CFO)

Oliver Albrecht (born 1964, German citizen) is CFO of SUSS MicroTec SE since November 18, 2019. He studied business administration at the University of Mannheim and at the Institut Commercial de Nancy after an apprenticeship as a banker. 1992 to 2003, he worked in the finance and banking sector as Director of Investment Banking and Corporate Finance. Between 2003 and 2019, he held various commercial positions at executive level: Head of Finance at Peri GmbH in Weißenhorn, Chief Financial Officer at centrotherm photovoltaics AG in Blaubeuren, Chief Financial Officer at SHW AG in Aalen, Managing Director of Vetter Pharma-Fertigung GmbH & Co KG in Ravensburg. He is not a member in statutory supervisory boards or other domestic and foreign supervisory bodies of commercial enterprises.

Thomas Rohe

Chief Operating Officer (COO)

Before his PhD as Dr. Ing. at the University of Stuttgart in 2001, Thomas Rohe (born 1966, German citizen)  studied Physics at the Technical University of Darmstadt. In 2009 and 2010 he completed an MBA course at the Universities of Augsburg and Pittsburgh (USA). Thomas Rohe began his professional career in 1994 at the Fraunhofer Institute ICT. In 2001, he joined the industry at Carl Zeiss SMT GmbH, where he was initially responsible for the development of wafer scanner optics as a product manager. In 2005, he became head of the LIT-TM Technology Mechatronics department. From 2007 to 2014, he also worked for companies of the Carl Zeiss Group as Business Unit Manager and, most recently, as Senior Director Operations in the Electron Microscopy Business Unit. He then assumed the position of Executive Board member and COO of Prueftechnik Dieter Busch AG, which was sold to the American Fortive Group and its subsidiary Fluke, respectively, in July 2019. Thomas Rohe has a high level of understanding of technology and manufacturing as well as relevant industry experience. He is not a member in statutory supervisory boards or other domestic and foreign supervisory bodies of commercial enterprises.

Supervisory Board

Dr. David Dean

Chairman of the Supervisory Board*

For more than 30 years, Dr. Dean has successfully worked at the executive level with global technology companies on their strategy and business development. After Masters and Doctoral degrees in physics and theoretical nuclear physics he started his career in academia before moving to the Boston Consulting Group in 1985. Between 1994 and 2013, Dr. Dean was a partner (from 2002 as Senior Partner) in the Technology & Telecoms practice of The Boston Consulting Group and held worldwide responsibility for this business between 2000 and 2006. Today, he shares his experience as an independent consultant and as a member of supervisory or advisory board of companies:

Senior Advisor to the Boston Consulting Group, Munich, Germany
Kaiteki Institute of Mitsubishi Chemical Holding Corp, Tokyo, Japan
PT XL Axiata Tbk, Jakarta, Indonesia
Axiata Group Berhad, Kuala Lumpur, Malaysia
Ncell Pvt Ltd, Kathmandu, Nepal

* Chairman of Supervisory Board since May 20, 2020. Elected until 2022.


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Dr. Myriam Jahn

Vice Chairman of Supervisory Board*

Dr. Myriam Jahn held various management and business consulting positions. She is Member of the Executive Board of q.beyond AG (former QSC AG). From 2016 to 2018, Dr. Jahn was Member of the Management Board of TiSC AG, a subsidiary of the ifm-group in Essen where she held various positions in sales and administration. After two years as member of the management board of q.beyond AG (previously known as QSC AG), she is now CEO of the digitization subsidiary of Possehl Group, Lübeck. With an academic background in Business Administration (master degree at Otto-Beisheim-Hochschule in Koblenz, 1993 and dissertation and PhD at University in Duisburg-Essen, 2003) Dr. Myriam Jahn also worked from 1999-2002 at  the Deutsche Gesellschaft für Mittelstandsberatung (DGM) and from 1994 to 1998  as consultant for Boston Consulting Group in Duesseldorf. In the supervisory board Dr. Myriam Jahn is focussed on the fields digitalization and industry 4.0.

* Since May 2017. Elected until 2022.

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Dr. Dietmar Meister

Member of the Supervisory Board*

Dietmar Meister started his professional career at Daimler-Benz AG, where he held various positions. In 1997 he joined Jungheinrich AG where he was Vice President Group Controlling until 2000. He then became Member of the Board / CFO of the Refrigeration Division in the Linde Group. From 2006 to 2009, he managed finances of the Brose group as its CFO. As CFO of the Vaillant Group, he was responsible for finances and services from 2009 to 2017. Since 2019, he has been working as an independent board advisory and consultant.
Dr. Dietmar Meister holds a PhD in Economics and is a member of the Regional Advisory Committee West at Commerzbank.  

* Since June, 2019. Elected until 2022.

Jan Smits

Member of the Supervisory Board*

Jan Smits has held various management positions in established technology companies in the semi-conductor industry, most recently at ASML Holding in the Netherlands where he worked for a total of around 22 years. From 2016 until 2019 he was Executive Vice President of Strategic Sourcing & Procurement. Until 2019, Mr. Smits held the positions of Director of ASML Netherlands and Member of the Executive Committee of ASML Holding in addition to heading the Strategic Purchasing Divi-sion. Prior to that, Mr. Smits was Head of the Lithography Business Unit "Deep UV" at ASML. From 1983 to 1997 Jan Smits worked at Philips Electronics responsible for planning and construction of various development and production sites, most recently as Program Director Equipment and Infra-structure MOS4 of Philips Semiconductor Inc.  Jan Smits holds a master degree as mechanical engineer at the Technical Univerisity Einhoeven, Netherlands.

* Member of Supervisory Board since May, 20, 2020. Elected until 2022.

Dr. Bernd Schulte

Member of the Supervisory Board

Dr. Bernd Schulte was a member of the Management Board of AIXTRON SE in Herzogenrath until March 2021. Since 2017 he was responsible for the areas of research and development, procurement, investor relations and communication, corporate governance, environment, social and governance as well as compliance and risk management. He started his academic career by studying physics at the Technical University of Darmstadt in 1983, where he graduated in 1989. In 1993, he received his PhD in Physics at the Technical University of Darmstadt. Before moving to AIXTRON, he worked as a re-search assistant for Hoechst AG in the early 1990s. His professional positions at AIXTRON include, for example, project and product management for the Asia-Pacific region and a management position in the compound semiconductor equipment division. From 2002 to 2017, Dr. Schulte worked as COO in the company's Management Board.

* Since June 21. Elected until 2026.


Financial Figures

  in € million 2020 2019 2018 2017 2016
 Business Development           
  Order entry 281.1 219.3 191.0 200.3 161.1
  Order backlog as of December 31 120.1 93.2 84.7 133.4 101.5
  Total Sales 252.1 213.8 203.9 166.5 177.6
  Gross profit 83.7 49.7 67.3 59.5 58.6
  Gross margin 33.2 % 23.2 % 33.0 % 35.7% 33.0%
  Gross profit – adjusted for extraordinary effects 83.8 63.9 67.3    
  Gross margin – adjusted for extraordinary effects 33.2 % 29.9 % 33.0 %    
  Cost of sales 168.4 164.1 136.7 107.0 119.0
  Cost of sales – adjusted for extraordinary effects 168.3 149.9 136.7 9.7 %  
  Research and Development costs 19.8 20.2 18.3 15.2 14.1
  EBITDA 28.2 -5.2 15.7 18.0 15.3
  EBITDA margin 11.2 % -2.4 % 7.7 % 10.8% 8.6%
  EBIT 20.4 -13.8 10.9 13.9 11.1
  EBIT margin 8.1 % -6.5 % 5.3 % 8.3% 6.3%
  EBIT – adjusted for extraordinary effects 23.0 0.5 10.9    
  EBIT margin – adjusted for extraordinary effects 9.1 % 0.2 % 5.3 %    
  Earnings after tax 12.4 -16.3 4.8 6.7 5.0
  Earnings per share, basic (in €) 0.65 -0.85 0.25 0.35 0.26
Extraordinary effects          
  Reversals/special write-downs on assets -2.1 14.2 - - -
  Closure costs included in the cost of sales 2.2 0.0 - - -
Balance Sheet and cash flow           
  Equity 136.5 125.4 140.4 127.0 124.4
  Equity ratio 59.0 % 62.7 % 70.3 % 62.9% 69.2%
  Return on equity 9.1 % -13.0 % 3.4 % 5.3% 4.0%
  Balance sheet total 231.4 199.9 199.6 202.0 179.6
  Net cash 20.3 -18.0 28.2 33.0 31.1
  Free cash flow 44.0 -36.9 -5.0 2.9 -9.1
 Further key figures           
  Investments 11.3 6.1 6.9 6.5 3.6
  Investment ratio 4.5 % 2.9 % 3.4 % 3.9% 2.0%
  Depreciation 7.8 8.6 4.8 4.1 4.2
  Employees as of December 31 1,009 937 881 779 711




SUSS MicroTec SE and its subsidiaries form an international corporation which manufactures and sells products in the field of microsystems technology and microelectronics. Production is concentrated at facilities in Garching and Sternenfels in Germany, in Neuchâtel, Switzerland and in Hsinchu, Taiwan.

The products are distributed through the production sites as well as through independent distributors in the USA, The Netherlands, France, United Kingdom, Japan, Singapore, Taiwan, China and Korea.

In countries in which SUSS MicroTec has no subsidiaries, our international presence is supported by a network of SUSS representatives.

Production Sites

Garching | Germany

The headquarters of SUSS MicroTec is located in Garching, a university city in the northern part of the district of Munich. SUSS MicroTec benefits from ideal infrastructure with an international airport close by, as well as direct access to the A9 motorway and excellent rail connections. In addition to the company headquarters, the development and production facilities of SUSS Mask Aligners, alignment and exposure equipment for lithographic applications, are also located in Garching.

Sternenfels | Germany

SUSS MicroTec’s largest production facility in Sternenfels accommodates three product lines, Coater/Developer, Wafer Bonder and Photomask Equipment under one roof. The Sternenfels premises, in the prosperous and scenic region between Karlsruhe and Stuttgart, meets the latest demands for development, production and management structures.


Neuchâtel | Switzerland

In Hauterive (Neuchâtel) subsidiary SUSS MicroOptics is manufacturing SUSS MicroTec’s special optics and other optical elements. Its proximity to the renowned watch and microtechnology industry as well as Swiss research institutes offers a significant advantage of location.


Hsinchu| Taiwan

The SUSS MicroTec facility in Taiwan consists of an office and a production area. It is located in the state-funded Science Park in Hsinchu, one of the world's most important centers for semiconductor manufacturing as well as industrial and computer technology development.
The facility covers an area of 4,800 square meters, of which 2,900 square meters consist of a cleanroom area, including storage. The primary activity will be production and delivery of the majority of SUSS ACS200 and ACS300 coaters/developers. In addition, UV projection scanner systems are designed and manufactured at this site.



In 1949 Karl Süss founds a sales representation for microscopes, cameras and laboratory equipment of Ernst Leitz Wetzlar in Munich. A garage is the first headquarter for the new business in post-war Germany. Soon the Karl Süss GmbH also provides service and maintenance for the optical devices thus quickly gaining reputation within the research community.

When Munich-based Siemens approaches Süss in 1962 and asks the company to produce a thermo-compression bonding machine for transistors this marks a tipping point in its history: The company moves from sales and maintenance to contract manufacturing. The first order comprises small measuring tables with stereo microscopes that are bonded together. One year later a second order follows and in 1963 Süss develops the prototype for the first mask aligner, the MJB3, for Siemens.

Karl Süss and his two sons Ekkehard and Winfried successfully expand the flourishing manufacturing business. The company soon needs to move its premises outside of Munich to Garching, where headquarters are still situated today.

While the semiconductor industry grows various other business opportunities are appearing. Süss starts producing test systems and diamond scribers.

The first double-side mask aligner allowing for dual-side exposure gets invented in 1974.  Having proven itself an acknowledged expert in photolithography for its partners in research and development Süss now tackles manufacturing customers. In 1975 it introduces with the MJB55 a first mask aligner for volume production.

The eighties are marked for Süss by a worldwide expansion. Süss launches its oversea business first with a site in the US, Waterbury, Vermont. Next, an Asian subsidiary is founded in Thailand in 1983, with more sales offices in Japan, China and Taiwan to follow. 

Süss gets ready for the production of bonders, additionally undertaking a side step into the very specialized field of xray stepper lithography. In Dresden, Germany, Süss opens a production site for probers.

Süss meets the growing demands for microsystems by releasing its first substrate bonder in 1989. Substrate bonders are used in microsystem technology to join heterogenous materials with patterned surfaces. In 1993 Süss adds device bonders to its product portfolio.

In 1994 Karl Süss and his eldest son Ekkehard Süss desease shortly one after the other. This sets off a reorganisation. The company is going public in 1999.  The Süss family remains represented in the advisory board by Karl Süss' son Dr. Winfried Süss. Two years later a name change for all legal Süss entitites into SÜSS MicroTec follows the new organisational form.

By the acquisition of Fairchild Technologies the company gains access to high-end markets with production coaters in 2000. In the year 2001 the microoptics business of the newly founded SUSS MicroOptcs reinforce the lithographic portfolio. In 2006 SÜSS MicroTec establishes its spin-off SUSS MicroTec Reman in the flourishing used equipment market. In 2007 the product line device bonders is sold, two years later the probers. In contrast, the opening of offices in Singapore and Korea strengthen the company's presence in the Asian market.

The recent years are characterized by focussing on core compentencies. In 2010 SÜSS MicroTec purchases Hamatech APE, an equipment supplier for photomask processing technology. In the same year, the newly purchased site in Sternenfels becomes home for the production of substrate bonders which have been moved from Waterbury, US. Coaters, bonders and photomask processing equipment are now being manufactured at the same site which therefore functions a compentence center for wet processing technology. With the acquisition of Tamarack Scientific in 2012 the company complements her lithographic portfolio with modern laser processing technology for microstructuring.