The SUSS MicroTec Group is a leading supplier of equipment and process solutions for microstructuring applications with 75 years of engineering experience.

Our portfolio covers a comprehensive range of products and solutions for backend lithography, wafer bonding and photomask processing.

The production of memory chips, cameras for mobile phones or tire pressure sensors – the equipment solutions of SUSS MicroTec are applied within a wide variety of manufacturing processes for applications of daily or industrial use. Customers in the semiconductor industry and related markets like Advanced Packaging, MEMS and LED appreciate our comprehensive experience in wafer processing. This makes us a valuable partner for high-volume production as well as for research and development.

Product Portfolio

Our portfolio covers a comprehensive range of products and solutions for backend lithography, wafer bonding, and photomask processing.

SUSS MicroTec Product Portfolio


Managing Board

Burkhardt Frick

Burkhardt Frick

Chief Executive Officer (CEO)

Burkhardt Frick (born 1965) has more than 30 years of experience in the high-tech industry. Prior to his appointment to the Management Board of SUSS MicroTec in September 2023, he had worked for the leading global semiconductor equipment manufacturer ASML since 2014. As the Vice President of Strategic Sourcing & Supply Chain, he was initially responsible for purchasing and strategic partnerships with some of the company’s most important suppliers. Since 2021, in his role as the Vice President of Corporate Marketing, he supported the Management Board with the long-term product and market strategy. Between 1994 and 2014, Burkhardt Frick served in various management positions in Philips' mobile display and semiconductor business, with stations of several years each in the USA and Hong Kong. Specifically, he led strategic marketing and sales organizations and most recently served as a member of the Management Board of Assembléon, a former Philips subsidiary. Burkhardt Frick lived in Asia and the USA for many years and has an excellent network in the sales markets that are most important for SUSS MicroTec. He is not a member of statutory supervisory boards or other domestic and foreign supervisory bodies of commercial enterprises.

Status September 2023

Cornelia Ballwießer

Dr. Cornelia Ballwießer

Chief Financial Officer (CFO)

Prior to her appointment to the Management Board of SÜSS MicroTec SE, Dr. Cornelia Ballwiesser (born 1965) was most recently a member of the Executive Board and CFO of Progress-Werk Oberkirch AG, a mobility industry company listed in the Deutsche Börse’s Prime Standard segment. There, between November 2020 and June 2023, she was responsible for finance, financial planning and analysis, investor relations, purchasing, IT, legal, compliance, and corporate governance. She previously served in various management roles in the automotive supply industry starting in 2001. Ballwiesser began her career at VIAG AG in Munich in 1995 and took charge of its corporate accounting activities in 1998. She studied business administration at Julius-Maximilians-Universität of Würzburg, where she worked as a research assistant at the Institute of Auditing and Consulting and completed her academic career with a doctorate in 1996. She is not a member of statutory supervisory boards or other domestic and foreign supervisory bodies of commercial enterprises.

Status: July 2023

Thomas Rohe

Dr. Thomas Rohe

Chief Operating Officer (COO)

Before his Ph.D. as Dr. Ing. at the University of Stuttgart in 2001, Thomas Rohe (born 1966, German citizen) studied Physics at the Technical University of Darmstadt. In 2009 and 2010 he completed an MBA course at the Universities of Augsburg and Pittsburgh (USA). Thomas Rohe began his professional career in 1994 at the Fraunhofer Institute ICT. In 2001, he joined the industry at Carl Zeiss SMT GmbH, where he was initially responsible for the development of wafer scanner optics as a product manager. In 2005, he became head of the LIT-TM Technology Mechatronics department. From 2007 to 2014, he also worked for companies of the Carl Zeiss Group as Business Unit Manager and, most recently, as Senior Director of Operations in the Electron Microscopy Business Unit. He then assumed the position of Executive Board member and COO of Prueftechnik Dieter Busch AG, which was sold to the American Fortive Group and its subsidiary Fluke, respectively, in July 2019. Thomas Rohe has a high level of understanding of technology and manufacturing, as well as relevant industry experience. He is not a member of statutory supervisory boards or other domestic and foreign supervisory bodies of commercial enterprises.

Status April 2021

Supervisory Board

Competence profile

Dr. Dean Dr. Jahn Dr. Schulte Jan Smits Prof. Steinkamp
Experience at the senior level of a technology company in a medium-sized and international environment, preferably C-level at a listed company ✓✓ ✓✓ ✓✓
Experience in the semiconductor market and semiconductor equipment market from a customer and technology perspective ✓✓ ✓✓
International leadership and customer experience with a focus on the main sales markets of SUSS MicroTec SE in Asia ✓✓ ✓✓ ✓✓
Experience in strategy development, execution, and resulting transformation processes in rapidly changing markets ✓✓ ✓✓ ✓✓ ✓✓
Information technology: Solid digitalization expertise, particularly in the development of Company processes ✓✓
Research and development: In-depth expertise in product digitalization and innovation ✓✓ ✓✓ ✓✓
Market: Extensive experience and expertise in sales, marketing, and after-sales service in the international machinery and plant engineering business ✓✓ ✓✓ ✓✓
Operations: Profound expertise in production, supply chains, and quality management in the international machinery and plant engineering business ✓✓ ✓✓
Human Resources: Experience and expertise in international human resources planning and leadership, talent management, and organizational development ✓✓
Finance: Expertise in accounting, financial reporting, and auditing in Supervisory Boards and Audit Committees in line with the GCGC and the new Section 100 (5), Section 107 (4) (3) AktG as part of the German Act on Strengthening Financial Market Integrity ✓✓ ✓✓
Internal control systems: Expertise in corporate planning, corporate management, internal auditing and compliance and risk management, particularly with regard to risks which relate to digitalization, such as cyber risks. ✓✓ ✓✓ ✓✓
Corporate finance: Experience in connection with listed companies, capital markets as well as M&A and the underlying legal framework ✓✓ ✓✓ ✓✓
Law: National and international legal and regulatory framework for Company processes and products ✓✓
Experience in supervisory and committee functions, knowledge of relevant compliance and corporate governance standards as well as social or sustainability issues (ESG) ✓✓ ✓✓ ✓✓ ✓✓ ✓✓

All members of the Supervisory Board of SÜSS MicroTec SE have declared their independence to the Company in accordance with the German Corporate Covernance Code section CII 6. and 7.

Members of the Supervisory Board

Dr. David Robert Dean

Dr. David Robert Dean

Chairman of the Supervisory Board of SÜSS MicroTec SE

For more than 30 years, Dr. Dean has successfully worked at the executive level with global technology companies on their strategy and business development. After Masters and Doctoral degrees in physics and theoretical nuclear physics, he started his career in academia before moving to the Boston Consulting Group in 1985. Between 1994 and 2013, Dr. Dean was a partner (from 2002 as Senior Partner) in the Technology & Telecoms Practice of The Boston Consulting Group and held worldwide responsibility for this business between 2000 and 2006.

Further Mandates:

  • Axiata Group Berhad, Kuala Lumpur, Malaysia (stocklisted), Member of the Board of Directors, also member of Audit Committee and Chairman of Risk & Compliance Committee
  • PT XL Axiata Tbk, Jakarta, Indonesia (stocklisted), Member of the Board of Commissioners

Chairman of the Supervisory Board since May 20, 2020. Elected until 2026.

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Dr. Myriam Jahn

Dr. Myriam Jahn

Vice Chairwoman of the Supervisory Board

Dr. Myriam Jahn brings her diverse technical, sales, and M&A experience to the Supervisory Board of SÜSS MicroTec SE: An academic business graduate and MSc in electrical engineering, with a doctorate in business informatics, she began her career in 1994 as a management consultant with the Boston Consulting Group in Düsseldorf. For 14 years she worked for the ifm Group, a leading sensor technology company and thus a customer of the semiconductor industry. There she held various responsible positions in sales and administration. Most recently, Dr. Jahn was a member of the executive board of TiSC AG here and was responsible for the sales division. After two years at q.beyond AG, an IT company specializing in digitization for medium-sized businesses, Dr. Jahn now heads the Possehl Group's digitization business unit (Possehl Digital GmbH) as Managing Director and CEO. On the Supervisory Board of SUSS MicroTec, Dr. Jahn primarily occupies the competence areas of digitalization and Industry 4.0.

Since 2022, Dr. Jahn has been a member of the advisory board of AUMA Riester GmbH & Co. KG in Müllheim.

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Dr. Bernd Schulte

Dr. Bernd Schulte

Member of the Supervisory Board

Dr. Bernd Schulte was a member of the Management Board of AIXTRON SE in Herzogenrath until March 2021. Since 2017 he had been responsible for the areas of research and development, procurement, investor relations and communication, corporate governance, environment, social and governance as well as compliance and risk management. He started his academic career by studying physics at the Technical University of Darmstadt in 1983, where he graduated in 1989. In 1993 he received his Ph.D. in Physics at the Technical University of Darmstadt. Before moving to AIXTRON, he worked as a research assistant for Hoechst AG in the early 1990s. His professional positions at AIXTRON include, for example, project and product management for the Asia-Pacific region and a management position in the compound semiconductor equipment division. From 2002 to 2017, Dr. Schulte worked as COO in the companyʼs Management Board. In the period from October 17, 2022 up to and including September 10, 2023, Dr. Schulte served as interim Chairman of the Management Board of SÜSS MicroTec SE and returned to the Supervisory Board as scheduled on September 11, 2023.

Further mandates: None

Member of the Supervisory Board since November 6, 2020. Elected until 2026.

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Jan Smits

Member of the Supervisory Board

Jan Smits has held various management positions in established technology companies in the semiconductor industry, most recently at ASML Holding in the Netherlands where he worked for a total of around 22 years. From 2016 until 2019 he was Executive Vice President of Strategic Sourcing & Procurement. Until 2019, Mr. Smits held the positions of Director of ASML Netherlands and Member of the Executive Committee of ASML Holding in addition to heading the Strategic Purchasing Division. Prior to that, Mr. Smits was Head of the Lithography Business Unit "Deep UV" at ASML and responsible for EUV sources. From 1983 until 1997 Jan Smits worked at Philips Electronics and was responsible for planning, construction, and equipment of various development and production sites, most recently as Program Director Equipment and Infrastructure MOS4 of Philips Semiconductor Inc. Jan Smits holds a master's degree as a mechanical engineer at the Technical University Eindhoven, Netherlands. He works part-time as COO of Bambi Medical, Eindhoven, Netherlands.
He was elected Member of the Supervisory Board at SÜSS MicroTec SE in May 2020.

Further mandates: none

Member of the Supervisory Board since May 20, 2020. Elected until 2025.

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Prof. Dr. Mirja Steinkamp

Prof. Dr. Mirja Steinkamp

Member of the Supervisory Board

Prof. Dr. Mirja Steinkamp is a tax consultant, auditor and professor of auditing and corporate accounting at the NORDAKADEMIE University of Applied Sciences in Hamburg/Elmshorn. She worked for several years as an audit manager at the international auditing company Ernst & Young GmbH and then spent 14 years as an authorized signatory and manager at a global trading company. During this time, she successfully introduced a management reporting system twice and was responsible for financial accounting at the German location, group accounting in accordance with IFRS and reporting to debt capital providers. Mirja Steinkamp has many years of experience as Chairwoman of the Audit Committee and as Vice Chairwoman of the Supervisory Boards of listed and unlisted companies. As an auditor, tax consultant and Chairwoman of the Audit Committee, she has particular knowledge and experience in the application of accounting principles in accordance with the German Commercial Code (HGB), the German Income Tax Act (EStG) and IFRS, the audit of internal control and risk management systems (including compliance management system), and the audit of sustainability reporting.
In 2019, Mirja Steinkamp was appointed to the Examination Board for Auditors for a period of five years. Since 2022, Mirja Steinkamp has been a lecturer at Interfin Forum GmbH, which offers the courses “Qualified Member of the Supervisory Board” and “Member of the Audit Committee/ Financial Expert”.

Further mandates:

  • Basler AG, Ahrensburg, Member of the Supervisory Board (Chairwoman of the Audit Committee)
  • BarthHass GmbH & Co. KG, Nuremberg, Member of the Supervisory Board (Vice Chairwoman)
  • Hochtief AG, Essen, Member of the Supervisory Board (Member of the Audit Committee)

Member of the Supervisory Board since March 10, 2022. Elected until 2026.

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Financial Figures

in € million 2022 2021 2020 2019 2018
Business Development
Order entry 446.2   337.0   281.1   219.3   191.0  
Order backlog as of December 31 346.4   193.9   120.1   93.2   84.7  
Total Sales 299.1   263.4   252.1   213.8   203.9  
Gross profit 110.1   94.2   83.7   49.7   67.3  
Gross profit margin 36.8 % 35.8 % 33.2 % 23.2 % 33.0 %
Cost of sales 189.1   169.2   168.4   164.1   136.7  
Research and Development costs 25.0   22.1   19.8   20.2   18.3  
EBITDA 41.9   29.5   28.2   -5.2   15.7  
EBITDA margin 14.0 % 11.2 % 11.2 % -2.4 % 7.7 %
EBIT 32.8   22.6   20.4   -13.8   10.9  
EBIT margin 11.0 % 8.6 % 8.1 % -6.5 % 5.3 %
Earnings after tax 24.5   16.0   12.4   -16.3   4.8  
Earnings per share, basic (in €) 1.28  0.86  0.65  -0.85  0.25 
Balance Sheet and cash flow
Equity 177.7   156.9   136.5   125.4   140.4  
Equity ratio 50.3 % 55.8 % 59.0 % 62.7 % 70.3 %
Return on equity 13.8 % 10.2 % 9.1 % -13.0 % 3.4 %
Balance sheet total 353.2   281.2   231.4   199.9   199.6  
Net cash 41.3   33.8   20.3   -18.0   28.2  
Free cash flow 16.0   14.7   44.0   -36.9   -5.0  
Further key figures
Investments 7.9   9.6   11.3   6.1   6.9  
Investment ratio 2.6 % 3.6 % 4.5 % 2.9 % 3.4 %
Depreciation 9.1   7.1   7.8   8.6   4.8  
Employees as of December 31 1.252   1,178   1,009   937   881  
in € million 2022 2021 2020 2019 2018


SUSS MicroTec SE and its subsidiaries form an international corporation that manufactures and sells products in the field of microsystems technology and microelectronics. Production is concentrated at facilities in Garching and Sternenfels in Germany and in Hsinchu in Taiwan.

The products are distributed through the production sites as well as through independent distributors in the USA, The Netherlands, France, United Kingdom, Japan, Singapore, Taiwan, China, and Korea.

In countries in which SUSS MicroTec has no subsidiaries, our international presence is supported by a network of SUSS representatives.

Production Sites

Garching | Germany

SUSS MicroTec building in Garching

The headquarters of SUSS MicroTec is located in Garching, a university city in the northern part of the district of Munich. SUSS MicroTec benefits from ideal infrastructure with an international airport close by, as well as direct access to the A9 motorway and excellent rail connections. In addition to the company headquarters, the development and production facilities of SUSS Mask Aligners, alignment and exposure equipment for lithographic applications, are also located in Garching.

Sternenfels | Germany

SUSS MicroTec building in Sternfels

SUSS MicroTec’s largest production facility in Sternenfels accommodates three product lines, Coater/Developer, Wafer Bonder and Photomask Equipment, under one roof. The Sternenfels premises, in the prosperous and scenic region between Karlsruhe and Stuttgart, meet the latest demands for development, production and management structures.

Hsinchu | Taiwan

SUSS MicroTec building in Hsinchus, Taiwan

The SUSS MicroTec facility in Taiwan consists of an office and a production area. It is located in the state-funded Science Park in Hsinchu, one of the world's most important centers for semiconductor manufacturing as well as industrial and computer technology development. The facility covers an area of 4,800 square meters, of which 2,900 square meters consist of a cleanroom area, including storage. The primary activity will be production and delivery of the majority of SUSS ACS200 and ACS300 coaters/developers. In addition, UV projection scanner systems are designed and manufactured at this site.


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