The SUSS MicroTec Group is a leading supplier of equipment and process solutions for microstructuring applications with 75 years of engineering experience.

Our portfolio covers a comprehensive range of products and solutions for backend lithography, wafer bonding and photomask processing.

The production of memory chips, cameras for mobile phones or tire pressure sensors – the equipment solutions of SUSS MicroTec are applied within a wide variety of manufacturing processes for applications of daily or industrial use. Customers in the semiconductor industry and related markets like Advanced Packaging, MEMS and LED appreciate our comprehensive experience in wafer processing. This makes us a valuable partner for high-volume production as well as for research and development.

Product Portfolio

Our portfolio covers a comprehensive range of products and solutions for backend lithography, wafer bonding, and photomask processing.

SUSS MicroTec Product Portfolio


Management Board

CEO Burckhardt Frick

Burkhardt Frick

Chief Executive Officer (CEO)

CFO Dr. Cornelia Ballwießer

Dr. Cornelia Ballwießer

Chief Financial Officer (CFO)

COO Dr. Thomas Rohe

Dr. Thomas Rohe

Chief Operating Officer (COO)

Supervisory Board

Dr. David Robert Dean

Dr. David Robert Dean

Chairman of the Supervisory Board

Dr. Myriam Jahn

Dr. Myriam Jahn

Vice Chairwoman of the Supervisory Board

Dr. Bernd Schulte

Dr. Bernd Schulte

Member of the Supervisory Board

Jan Smits

Jan Smits

Member of the Supervisory Board

Prof. Dr. Mirja Steinkamp

Prof. Dr. Mirja Steinkamp

Member of the Supervisory Board

Competence Profile

Implementation of the Competency Profile (incl. Diversity Concept)
Length of Membership Dr. Dean Dr. Jahn Dr. Schulte Jan Smits Prof.
Member since 2020 2017 2020 2020 2022
Elected until 2026 2026 2026 2025 2026
Diversity Dr. Dean Dr. Jahn Dr. Schulte Jan Smits Prof.
Year of Birth 1958 1968 1962 1954 1970
Gender male female male male female
Nationality british / german german german dutch german
Educational Background PhD Physics PhD Business Administration PhD Physics Master's Degree Engineering Professor for Corporate Accounting and Auditing
Skill Profile Dr. Dean Dr. Jahn Dr. Schulte Jan Smits Prof.
Integrity and assumption of ethical responsibility ✓✓ ✓✓ ✓✓ ✓✓ ✓✓
Business or operational understanding of business models in and outside the semiconductor market ✓✓ ✓✓
Commitment ✓✓ ✓✓ ✓✓ ✓✓ ✓✓
Analytical and systematic thinking as well as vision ✓✓ ✓✓ ✓✓ ✓✓ ✓✓
Openness to new ideas and innovative thinking ✓✓ ✓✓ ✓✓ ✓✓ ✓✓
Negotiation and reasoning skills ✓✓ ✓✓ ✓✓ ✓✓ ✓✓
Social skills ✓✓ ✓✓ ✓✓ ✓✓ ✓✓
Team player, especially given the need for interdisciplinary collaboration ✓✓ ✓✓ ✓✓ ✓✓ ✓✓
Appreciation of cultural diversity ✓✓ ✓✓
Independence ✓✓ ✓✓ ✓✓ ✓✓ ✓✓
Qualification Matrix Dr. Dean Dr. Jahn Dr. Schulte Jan Smits Prof.
Experience at the senior level of a technology company in a medium-sized and international environment, preferably C-level at a listed company ✓✓ ✓✓ ✓✓  
Experience in the semiconductor market and semiconductor equipment market from a customer and technology perspective ✓✓ ✓✓
International leadership and customer experience with a focus on the main sales markets of SUSS MicroTec SE in Asia ✓✓ ✓✓ ✓✓  
Experience in strategy development, execution, and resulting transformation processes in rapidly changing markets ✓✓ ✓✓ ✓✓ ✓✓
Information technology: Solid digitalization expertise, particularly in the development of Company processes   ✓✓
Research and development: In-depth expertise in product digitalization and innovation   ✓✓ ✓✓ ✓✓  
Market: Extensive experience and expertise in sales, marketing, and after-sales service in the international machinery and plant engineering business ✓✓ ✓✓ ✓✓  
Operations: Profound expertise in production, supply chains, and quality management in the international machinery and plant engineering business   ✓✓ ✓✓  
Human Resources: Experience and expertise in international human resources planning and leadership, talent management, and organizational development ✓✓
Accounting: Special knowledge and experience in the application of accounting principles and internal control and risk management systems as well as in financial reporting and non-financial reporting or sustainability reporting ✓✓     ✓✓
Auditing: Special knowledge and experience in auditing financial statements and auditing non-financial and sustainability reporting     ✓✓
Internal control systems: Expertise in corporate planning, corporate management, internal auditing and compliance and risk management, particularly with regard to risks which relate to digitalization, such as cyber risks. ✓✓ ✓✓ ✓✓
Corporate finance: Experience in connection with listed companies, capital markets as well as M&A and the underlying legal framework ✓✓ ✓✓ ✓✓
Law: National and international legal and regulatory framework for Company processes and products     ✓✓
Experience in target and implementation in environmental issues, in particular greenhouse gas (GHG) reduction and circular economy, in products and processes, proven knowledge of the associated standards (environment) ✓✓ ✓✓ ✓✓ ✓✓
Experience in target and implementation in social and socio-political issues, in particular employee satisfaction and employer branding (social) ✓✓ ✓✓
Experience in supervisory and committee work, knowledge of relevant CSR, GCGC and other corporate governance standards, in particular in connection with compliance and risk management and responsible supply chain (governance) ✓✓ ✓✓ ✓✓
Dr. Dean Dr. Jahn Dr. Schulte Jan Smits Prof.

Key Figures

in € million     2023*     2022*     2021     2020     2019
Business Development
Order Intake 420.5   411.0   337.0   281.1   219.3  
Order Book as of Dec 31 452.5   335.4   193.9   120.1   93.2  
Total Sales 304.3   260.0   263.4   252.1   213.8  
Gross Profit 103.9   100.6   94.2   83.7   49.7  
Gross Profit Margin 34.1 % 38.7 % 35.8 % 33.2 % 23.2 %
Cost of Sales 200.4   159.3   169.2   168.4   164.1  
Research and Development Costs 31.3   28.7   22.1   19.8   20.2  
EBITDA 34.7   37.4   29.6   28.2   -5.2  
EBITDA Margin 11.4 % 14.4 % 11.2 % 11.2 % -2.4 %
EBIT 27.8   31.5   22.6   20.4   -13.8  
EBIT Margin 9.1 % 12.1 % 8.6 % 8.1 % -6.5 %
Net Income (Earnings after taxes) 17.3   23.3   16.0   12.4   -16.3  
Earnings per Share (basic) 0.91   1.22   0.86   0.65   -0.85  
Balance Sheet and Cash Flow
Equity 176.6   177.7   156.9   136.5   125.4  
Equity Ratio 47.8 % 50.3 % 56.2 % 59.0 % 62.7 %
ROCE (Return on Capital Employed) 17.5 % 23.6 % 14.0 % 12.9 %
Balance Sheet Total 369.7   353.2   279.2   231.4   199.9  
Net Cash 32.8   41.3   33.8   20.3   -18.0  
Free Cash Flow 7,9   17,0   14,7   44,0   -36,9  
Further Key Figures
Capital Expenditure 4,6   4,1   9,6   11,3   6,1  
Capital Expenditure in Percent of Sales 1,5 % 1,6 % 3,6 % 4,5 % 2,9 %
Depreciation 6,9   5,9   7,1   7,8   8,6  
Employees as of December 31 1.207   1.091   1.178   1.009   937  
in € million     2023     2022     2021     2020     2019
*without SUSS MicroOptics


SUSS MicroTec SE and its subsidiaries form an international corporation that manufactures and sells products in the field of microsystems technology and microelectronics. Production is concentrated at facilities in Garching and Sternenfels in Germany and in Hsinchu in Taiwan.

The products are distributed through the production sites as well as through independent distributors in the USA, The Netherlands, France, United Kingdom, Japan, Singapore, Taiwan, China, and Korea.

In countries in which SUSS MicroTec has no subsidiaries, our international presence is supported by a network of SUSS representatives.

Production Sites

Garching | Germany

SUSS MicroTec building in Garching

The headquarters of SUSS MicroTec is located in Garching, a university city in the northern part of the district of Munich. SUSS MicroTec benefits from ideal infrastructure with an international airport close by, as well as direct access to the A9 motorway and excellent rail connections. In addition to the company headquarters, the development and production facilities of SUSS Mask Aligners, alignment and exposure equipment for lithographic applications, are also located in Garching.

Sternenfels | Germany

SUSS MicroTec building in Sternfels

SUSS MicroTec’s largest production facility in Sternenfels accommodates three product lines, Coater/Developer, Wafer Bonder and Photomask Equipment, under one roof. The Sternenfels premises, in the prosperous and scenic region between Karlsruhe and Stuttgart, meet the latest demands for development, production and management structures.

Hsinchu | Taiwan

SUSS MicroTec building in Hsinchus, Taiwan

The SUSS MicroTec facility in Taiwan consists of an office and a production area. It is located in the state-funded Science Park in Hsinchu, one of the world's most important centers for semiconductor manufacturing as well as industrial and computer technology development. The facility covers an area of 4,800 square meters, of which 2,900 square meters consist of a cleanroom area, including storage. The primary activity will be production and delivery of the majority of SUSS ACS200 and ACS300 coaters/developers. In addition, UV projection scanner systems are designed and manufactured at this site.


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  • 2020s