SUSS MicroTec Extends Technology Portfolio by Laser Surface Imaging

SUSS MicroTec Extends Technology Portfolio by Laser Surface Imaging

DGAP-Media / 2016-05-04 / 09:00

SUSS MicroTec Extends Technology Portfolio by Laser Surface Imaging

Garching, May 4, 2016 - SUSS MicroTec, a global supplier of equipment and process solutions for the semiconductor industry and related markets, today announces the extension of its technology range by leading-edge laser surface imaging. This technology has been developed through an external partner in Europe and the first SUSS product will be launched in Q2 2016.

This process is well-suited not only for resist structuring, but also for lithography mask production, micro-ablation, and high-resolution metrology. The highly flexible technology is suitable for the various requirements of academic and industrial R&D laboratories. Its main fields of application include submicron- and 3D structuring, microfluidics, mask manufacturing and the definition of micro-optical components.

"With laser surface imaging, we aim to strengthen our leadership position in the lithography segment, in particular in the attractive MEMS market." says Dr. Per-Ove Hansson, CEO of SUSS MicroTec. "By initially targeting the R&D market, we expect order intake and sales to be in the low million Euro range for the time being. Longer term we aim to develop this technology further in order to address higher volume manufacturing applications as well."

About SUSS MicroTec
SUSS MicroTec is a leading supplier of equipment and process solutions for microstructuring in the semiconductor industry and related markets. In close cooperation with research institutes and industry partners SUSS MicroTec contributes to the advancement of next-generation technologies such as 3D Integration and nanoimprint lithography as well as key processes for MEMS and LED manufacturing. With a global infrastructure for applications and service SUSS MicroTec supports more than 8.000 installed systems worldwide. SUSS MicroTec is headquartered in Garching near Munich, Germany. For more information, please visit

SUSS MicroTec AG
Franka Schielke
Schleissheimer Strasse 90
85748 Garching, Deutschland
Tel.: +49 (0)89 32007-161
Fax: +49 (0)89 32007-451

End of Media Release

Issuer: SÜSS MicroTec AG
Key word(s): Research/Technology

2016-05-04 Dissemination of a Press Release, transmitted by DGAP - a service of EQS Group AG.
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