DGAP-News: SÜSS MicroTec AG / Key word(s): Product Launch
Garching, September 6, 2016 - SUSS MicroTec, a leading supplier of equipment and process solutions for the semiconductor and related markets, today announced the launch of its new generation of the fully automated ACS300 platform. The modular system of the ACS300 Gen3 is specifically designed for high volume manufacturing of advanced packaging applications such as wafer-level chip-scale packaging, fan-out wafer-level packaging, copper pillar flip-chip and 3D packaging.
The tool addresses the needs of a highly competitive and cost-sensitive market. Efficient module stacking allows for the smallest footprint for a system with eight coaters and developers on the market, saving costly cleanroom space. The three-level modular system delivers high yield and throughput by fast and precise robots, intelligent scheduling algorithms and a highly advanced monitoring system. The ACS300 Gen3 provides for simultaneous 200 mm and 300 mm wafer processing without the need for a mechanical changeover. In addition, the tool can be equipped to handle 330 mm and warped wafers with a warpage of up to 10mm. The ability to process multiple wafer shapes and sizes as well as various coat and develop materials makes the platform an efficient all-in-one solution. State-of-the-art chemical-saving features address economic as well as ecological concerns, working in line with even the most rigid sustainability standards.
"The ACS300 Gen3 is our new flagship for the advanced packaging market. Having worked in close collaboration with our customers, we have created a platform that really excels. We are very excited to present some new groundbreaking functions. The ACS300 Gen3 stands for high process stability, repeatability and yield. For example, it has more sensors for logging and control than any coating system SUSS MicroTec has ever produced", says Gary Choquette, General Manager of the Coater/Developer product line. "With this brand new generation of the ACS300, we supply our customers with a high-quality, state-of-the-art tool at a very favorable cost of ownership."
About SUSS MicroTec
SUSS MicroTec AG
Senior Manager Investor Relations
Schleissheimer Strasse 90
85748 Garching, Deutschland
Tel.: +49 (0)89 32007-161
Fax: +49 (0)89 32007-451
|Company:||SÜSS MicroTec AG|
|Schleissheimer Strasse 90|
|Phone:||+49 (0)89 32007-161|
|Fax:||+49 (0)89 32007-451|
|Listed:||Regulated Market in Frankfurt (Prime Standard); Regulated Unofficial Market in Berlin, Dusseldorf, Hamburg, Hanover, Munich, Stuttgart, Tradegate Exchange|
|End of News||DGAP News Service|