SUSS Dispense System - Auto Calibration / Self-Learning

The SUSS Dispense System (SDS) is a pressure based dispense system, which is used to dispense chemicals for coating and developer processes with a repeatability of ± 1% and an absolute accuracy of ± 2%. The system setup uses standard components and intelligent software algorithms to achieve precise dispense results.

To optimize this a new automated calibration and self-learning / self-optimizing algorithms needed to be evaluated and implemented, to simplify the system setup and maintenance in the field and also to improve the cost of ownership.

Now in the new update, the system intelligence is improved further with the complexity being taken away from the user. Thus, the system is more intelligent, more stable and with reduced tolerance to errors, and offers significant reduction in time and effort for setup and calibration.