SUSS SMILE Technology – Large Area Imprint. A Solution for Patterning of Micro and Nano Features
The most critical process specifications typically coming from the microlens market are the accuracy and the uniformity of the thickness of the polymer constituting the optical device, directly affecting the optical proprieties of the end product. It is then clear that the extremely high degree of control that the SMILE technology allows in the imprinting process presents a strong advantage for customers in this field. In the present article, the current status of the SMILE technology will therefore be reviewed, with particular focus on its flexibility in performing different types of processes.