Remanufactured Equipment

Exclusive Remanufacturing

Our engineers carefully design our wafer processing equipment for long periods of use. A service life of 15 years or longer is not at all uncommon – proof of the excellent return on investment our equipment provides. Year after year, equipment manufactured by SUSS MicroTec proves its worth in terms of quality, reliability and durability. In fact, machines manufactured by the Karl Süss company, which after an IPO in 1999 became SUSS MicroTec, are still highly regarded throughout the semiconductor industry worldwide.

The division SUSS MicroTec Reman is dedicated to meeting the growing demand for remanufactured pre-owned machines. Customers looking to expand production capacities with the addition of equipment from an earlier generation that matches their existing system, thus ensuring a reliable transfer of existing processes, can choose a system bearing the SUSS MicroTec Remanufactured brand.

Refurbished vs. Remanufactured

While used machines are usually refurbished using only some original components, our remanufacturing service provides a special guarantee: exclusively manufacturer-specified original parts are used. In addition, used equipment is extensively overhauled to restore it to its original condition. This sets SUSS MicroTec apart from many other companies competing in the used machine market for semiconductor manufacturing.

Certified Quality

Each and every remanufactured machine SUSS MicroTec offers meets our superior standards of quality and precision. Every system is prepared according the original specification and performance data. 

Our OEM certificate includes:


Six-month warranty

Safety feature updates

Pre and final acceptance tests 

Phone support and on site field service

Long term spare part availability

Complete documentation


We offer remanufactured equipment for semiconductor production and microstructuring from the complete line of SUSS MicroTec products. This includes currently available equipment as well as machines that after serving our customers reliably for many years have been remanufactured and certified. You will find a selection of such machines at the bottom of the page. 

For R&D departments and institutions, we also offer reasonably priced manual equipment for initial needs.

We are looking forward to your request!

Product Listing


Equipment that has been professionally remanufactured by our engineers conforms with the same quality standards as applied to the original machine. Our OEM certificate of authenticity guarantees it.

It is a priority concern for us that your remanufactured equipment is safe. Every remanufacturing process always includes a complete inspection of all safety issues as well as an acceptance test. It goes without saying that all approved equipment conforms with currently applicable safety requirements.

Each piece of remanufactured equipment is supplied with a complete set of original technical documents. This includes a User Manual, Service Manual, Safety Instructions as well as a CD-ROM with diagrams of electronic and pneumatic systems.

At the customer’s request, we add features to enhance performance, making the remanufactured equipment for wafer processing compatible with the most advanced technical requirements. Such features include software updates or our newest optics designs (e.g. MO Exposure Optics). 

Save time and money. At the customer’s request we modify the system to be compatible with the customer's system environment. This minimizes spare part inventory and time for the process integration of the additional system and eliminates any need for operator training.

Trained, qualified staff is at your service for inspections, maintenance and repairs of remanufactured equipment. A team of highly qualified service engineers is on duty all over the globe. The services we provide for SUSS MicroTec remanufactured equipment are exactly the same as for new machines.

  • Technical advice and spare part identification on the phone
  • On site service and technical support
  • Preventive maintenance program
  • Complete Documentation 

For your remanufactured equipment, we offer original spare parts by SUSS MicroTec or OEM parts. All materials used conform to quality standards and meet the most stringent requirements.

Selling used equipment is a simple way of making room for a new machine or of meeting short-term liquidity needs. Finding a buyer is often a tedious task that we are happy to relieve you of: simply offer your used SUSS machine to us. We provide a professional estimate of equipment value and pay you a competitive market price.

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