Süss MicroTec Cooperates with Research Institute ITRI on Technology Development in 3D Integration

Süss MicroTec Cooperates with Research Institute ITRI on Technology Development in 3D Integration

Süss MicroTec AG / Alliance


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SUSS MicroTec Cooperates with Research Institute ITRI on Technology
Development in 3D Integration

Garching/Munich, GERMANY - September 28, 2009 - SUSS MicroTec, a leading
supplier of innovative process and test solutions for the semiconductor
industry and related markets, announced today that it is engaging with one
of the world's leading research institutes, the Industrial Technology
Research Institute (ITRI) in Tawain, on the development of 3D integration
technologies. The Advanced Stacked-System Technology and Application
Consortium (Ad-STAC), a multinational research association led by ITRI,
will implement the 300mm lithography cluster LithoPack300 and the 300mm
bond cluster CBC300 of SUSS MicroTec in its 300mm demo production line at
ITRI in Hsin-Chu, Taiwan. With this SUSS MicroTec is joining the consortium
and will actively apply its expertise in 3D Integration to further process

The Ad-STAC aims at driving technology advances for industrial development
in the field of 3D Integration. It consists of 12 multinational companies
installing the world's first 300mm demo-production line, targeting solely
at 3D research and development. This line provides state-of-the-art
equipment and materials for a wide range of processes. The facility which
is open to all parties interested in 3D development offers companies from
different fields as well as research institutes a unique environment to
develop and test new technologies and products.

The 300mm wafer processing equipment of SUSS MicroTec joining the demo
production line represents the core solutions of the SUSS MicroTec 300mm
portfolio. The LithoPack300 integrates two latest generation 300mm
photolithography modules, the MA300 Gen2 mask aligner and the ACS300 Gen3
spray coater, in one system. The CBC300 is a modular wafer bonding platform
configured to run the latest fusion bonding techniques with plasma
activation, thermo compression bonding including copper-to-copper (CuCu)
bonds for 3D Integration. It offers temporary bonding capability using the
latest generation adhesives specifically designed for the 3D applications.

'We are looking forward to SUSS MicroTec joining Ad-STAC,' noted Dr. Ian
Chan, VP & EOL General Director of ITRI. 'SUSS MicroTec is known as the
leading expert in their field so I am confident that their experience will
become a real asset to the challenging environment of our demo production

'We are proud to have become part of this important alliance in ITRI's
Ad-STAC program,' stated Frank Averdung, CEO and President of SUSS
MicroTec. 'We will be working with worldwide leading research and industry
partners on viable production platforms to enable cost efficient and high
yielding manufacturing processes. Being at the forefront of technology
development we will be able to directly pass our technology advancements on
to our customers to shorten the time to market for our customers' advanced

SUSS MicroTec has recently released announcements on a range of research
activities on 3D integration technology development. An update about the
latest advances for challenging 3D integration processes will be provided
in a workshop during Semicon Taiwan, October 2, in Hsin-Chu, Taiwan. For
further information please visit http://www.suss.com/semicontaiwan_2009.

About SUSS MicroTec
SUSS MicroTec (listed in Deutsche Börse AG's Prime Standard) is a leading
supplier of process and test solutions for markets such as 3D Integration,
Advanced Packaging, MEMS, Nanotechnology and Compound Semiconductor.
High-quality solutions enable customers to increase process performance
while reducing cost of ownership.

SUSS MicroTec supports more than 8,000 installed mask aligners, coaters,
bonders and probe systems with a global infrastructure for applications and
service. SUSS MicroTec is headquartered in Garching near Munich, Germany.
For more information, please visit http://www.suss.com

About ITRI
Industrial Technology Research Institute (ITRI) - a national research
organization that serves to strengthen the technological competitiveness of
Taiwan. As of today more than 60% of the ITRI's 6,000 employees hold either
a Master's degree or PhD in their respective field of studies:
Communication and Optoelectronics, Precision Machinery and MEMS, Materials
and Chemical Engineering, Biomedical Technology, Sustainable Development,
and Nanotechnology. Our focus on these six major fields will lay down the
foundation for innovative research in the future of technological industry,
and hence, transform our domestic industry into global bedrock for
technological innovation.


SÜSS MicroTec AG
Julia Hartmann
Investor Relations / PR
Schleissheimer Strasse 90
85748 Garching, Deutschland
Tel.: +49 (0)89 32007-161
Fax: +49 (0)89 32007 336 
Email: julia.hartmann@suss.com

28.09.2009  Financial News transmitted by DGAP

Language:     English
Company:      Süss MicroTec AG
              Schleissheimer Strasse 90
              85748 Garching b. München
Phone:        +49 (0)89 32007-161
Fax:          +49 (0)89 32007-336
E-mail:       ir@suss.com
Internet:     www.suss.com
ISIN:         DE0007226706
WKN:          722670
Listed:       Regulierter Markt in Frankfurt (Prime Standard); Freiverkehr
              in Berlin, Düsseldorf, München, Hamburg, Stuttgart
End of News                                     DGAP News-Service