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SUSS MicroTec’s semi-automated wet-processing system SD12 offers superior cleaning and lift-off functions for solvent media applications. The single-wafer processing platform serves pieces, wafer sizes up to 300 mm, square substrates up to 230 x 230 mm and tape frames for wafers up to 300 mm. Its ability to handle various media and processes gives the flexibility needed for switching between applications and makes the tool first choice for research environment and small scale production.
Specially designed for solvent based processes
Excels in process versatility with a wide range of dispense technologies
High safety standards
The SD12 demonstrates its versatility by handling many different kinds of substrates using optimized chucks. Even fragile substrates (e.g. InP, GaAs) can be securely processed. Special tooling and an extensive range of easily adjustable process parameters make the SD12 suitable for many process applications involving solvent media. With the ability to program parameters such as step time, spin speed, acceleration and deceleration, dispense arm position and swivel movement the system allows for an optimized process flow resulting in reproducible and stable process results. Equipped with SUSS MicroTec’s sophisticated dispense technologies the SD12 efficiently supports development, lift-off and cleaning.
The SD12 offers a broad range of dispense technologies for different process needs. A wide range of processes can be run: from a simple puddle or spray development to lift-off that requires, besides puddle dispense for soaking and final rinse, a high-pressure to lift off the resist and the metal. Special applications such as cleaning of adhesives from wafers mounted on tape frame that may require the support of a mega-sonic transducer for optimal cleaning results can also be performed. All of the above mentioned dispense technologies can be configured at the dispense arm of SD12.
The SD12 is tailored for the special needs of handling solvent-based media. All parts coming into contact with process chemicals are made of unsusceptible materials. The drain can be connected to the house drain or to waste canisters.
Media are safely stored in a media storage equipped with exhaust connection and secured by solvent leakage detector and a gas sensor. Flow control systems and pressure regulators manage the media. Optionally, the media temperature can be controlled to secure optimal process results. A recirculation system for the media can be installed in order to reduce overall media consumption.
The SD12 is easy to operate and maintain. Process parameters and media data can be recalled at the push of a button. Programmable recipes accelerate workflow and facilitate repeatability. All parts are easily accessible for convenient operation and maintenance of the tool. Moreover, the tool was designed with a primary focus on operator safety. A sealed process chamber with an automatic safety glass door ensures an enclosed process environment and facilitates monitoring of the process. Interlock sensors guarante the safe operation of the tool.